XZ-Axis Vacuum Compatible Horizontal Surface EXC™ Stainless Steel Stages

TSDS-4

XZ-Axis Vacuum Compatible Horizontal Surface EXC™ Stainless Steel Stages
In stock
SKU
TSDS-4

Starting at $1,134.00

These XZ-axis stages have a horizontal mounting surface. They are made for use in 1E-6 Torr vacuum or clean room environments and feature Opto Sigma's EXC™ precision bearing ways. These bearing ways are not separate parts, as with competing stages, but processed directly into the body and base of the stage resulting in the highest stiffness, straightness and smoothness of any stage on the market. They remain unmatched in overall performance to this day. TSDS stages are made completely from hardened 440C stainless steel for excellent cleanliness and corrosion resistance. Both the stage and the stainless steel micrometer head (included) have vented attachment holes and are lubricated with a high-grade vacuum grease (YVAC2).
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Name Stage Size Travel Load Capacity Mounting Thread Delivery Price Add to cart
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, XZ-Axis Stage, Center Micrometer, +/-6.5/3.0mm, M3 Threads
TSDS-404C
40×40mm X axis±6.5mm Z axis±3mm 88.3N (9.0kg) M3
6-12 weeks
$1,197.60
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Moment Stiffness / Pitch 2.2″/N・cm
Moment Stiffness / Roll 2.15″/N・cm
Parallelism 110μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, XZ-Axis Stage, Center Micrometer, +/-6.5/6.5/3.0mm, 6-32 Threads
TSDS-404SUU
40×40mm X axis±6.5mm Z axis±3mm 88.3N (9.0kg) 6-32UNC
6-12 weeks
$1,197.60
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Moment Stiffness / Pitch 2.2″/N・cm
Moment Stiffness / Roll 2.15″/N・cm
Parallelism 110μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, XZ-Axis Stage, Center Micrometer, +/-6.5/5.0mm, M6 Threads
TSDS-654C-M6
65×65mm X axis±6.5mm Z axis±5mm 147N (15.0kg) M6
6-12 weeks
$1,298.40
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Roll 6.9N・m
Moment Stiffness / Pitch 0.75″/N・cm
Moment Stiffness / Roll 0.75″/N・cm
Parallelism 110μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, XZ-Axis Stage, Side Micrometer, +/-6.5/5.0mm, 1/4-20 Threads
TSDS-654SUU
65×65mm X axis±6.5mm Z axis±5mm 147N (15.0kg) 1/4-20UNC
6-12 weeks
$1,298.40
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Roll 6.9N・m
Moment Stiffness / Pitch 0.75″/N・cm
Moment Stiffness / Roll 0.75″/N・cm
Parallelism 110μm
i
25X25mm EXC Bearing, Vacuum Compatible, Stainless Steel, XZ-Axis Stage, Center Micrometer, +/-3mm, M2 Threads
TSDS-254C
25×25mm X axis±3mm Z axis±3mm 29.4N (3.0kg) M2
6-12 weeks
$1,134.00
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 5μm
Max. Moment Capacity / Pitch 1.0N・m
Max. Moment Capacity / Roll 1.0N・m
Moment Stiffness / Pitch 8.95″/N・cm
Moment Stiffness / Roll 8.75″/N・cm
Parallelism 110μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, XZ-Axis Stage, Center Micrometer, +/-6.5/3.0mm, 6-32 Threads
TSDS-404CUU
40×40mm X axis±6.5mm Z axis±3mm 88.3N (9.0kg) 6-32UNC
6-12 weeks
$1,197.60
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Moment Stiffness / Pitch 2.2″/N・cm
Moment Stiffness / Roll 2.15″/N・cm
Parallelism 110μm
i
60X60mm EXC Bearing, Vacuum Compatible, Stainless Steel, XZ-Axis Stage, Center Micrometer, +/-6.5/5.0mm, M4 Threads
TSDS-604C
60×60mm X axis±6.5mm Z axis±5mm 147N (15.0kg) M4
6-12 weeks
$1,298.40
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Roll 6.9N・m
Moment Stiffness / Pitch 0.75″/N・cm
Moment Stiffness / Roll 0.75″/N・cm
Parallelism 110μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, XZ-Axis Stage, Center Micrometer, +/-6.5/5.0mm, 1/4-20 Threads
TSDS-654CUU
65×65mm X axis±6.5mm Z axis±5mm 147N (15.0kg) 1/4-20UNC
6-12 weeks
$1,298.40
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Roll 6.9N・m
Moment Stiffness / Pitch 0.75″/N・cm
Moment Stiffness / Roll 0.75″/N・cm
Parallelism 110μm
i
25X25mm EXC Bearing, Vacuum Compatible, Stainless Steel, XZ-Axis Stage, Center Micrometer, +/-3mm, M2 Threads
TSDS-254S
25×25mm X axis±3mm Z axis±3mm 29.4N (3.0kg) M2
6-12 weeks
$1,134.00
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 5μm
Max. Moment Capacity / Pitch 1.0N・m
Max. Moment Capacity / Roll 1.0N・m
Moment Stiffness / Pitch 8.95″/N・cm
Moment Stiffness / Roll 8.75″/N・cm
Parallelism 110μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, XZ-Axis Stage, Center Micrometer, +/-6.5/3.0mm, M3 Threads
TSDS-404S
40×40mm X axis±6.5mm Z axis±3mm 88.3N (9.0kg) M3
6-12 weeks
$1,197.60
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Moment Stiffness / Pitch 2.2″/N・cm
Moment Stiffness / Roll 2.15″/N・cm
Parallelism 110μm
i
60X60mm EXC Bearing, Vacuum Compatible, Stainless Steel, XZ-Axis Stage, Side Micrometer, +/-6.5/5.0mm, M4 Threads
TSDS-604S
60×60mm X axis±6.5mm Z axis±5mm 147N (15.0kg) M4
2-3 weeks
$1,298.40
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Roll 6.9N・m
Moment Stiffness / Pitch 0.75″/N・cm
Moment Stiffness / Roll 0.75″/N・cm
Parallelism 110μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, XZ-Axis Stage, Side Micrometer, +/-6.5/5.0mm, M6 Threads
TSDS-654S-M6
65×65mm X axis±6.5mm Z axis±5mm 147N (15.0kg) M6
2-3 weeks
$1,298.40
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Roll 6.9N・m
Moment Stiffness / Pitch 0.75″/N・cm
Moment Stiffness / Roll 0.75″/N・cm
Parallelism 110μm

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