Active Vibration Isolation Systems
Active vibration isolation systems are made to sit atop an optical table or work station to proactively detect and isolate vibrations from affecting the work surface. They consist of a spring, feedback, and feed-forward control algorithm with vibration sensors and actuators. The feedback control algorithm uses sensors that continuously measure vibrations originating from the floor or the from the payload, and sends signals to the actuators to cancel out the vibration. Applications for desk top active vibration isolation platforms include atomic force microscopy, fluorescence microscopy, scanning probe microscopy, 3D optical microscopy, optical microscopy with nanometer resolution, digital holographic microscopy, stylus profilometry, interferometry, surface roughness metrology.