Vacuum Compatible Linear Stages1 Axis (X/Y)

VSGSP-(X)

Vacuum Compatible Linear Stages1 Axis (X/Y)
In stock
SKU
VSGSP-(X)

Starting at $4,896.00

Motorized SGSP stages modified for use in high vacuum.
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Name Travel Load Capacity Delivery Price Add to cart
i
Motorized Single Axis Stage Series 20 Travel 35mm for Vacuum
VSGSP20-35(X)
±35mm 39.2N (4.0kg)
6-12 weeks
$7,650.00
Travel 35mm
Stage Size 60×60mm
Feed Screw Precision ground screw φ6mm、 1mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium・Stainless steel
Finish None
Resolution (Half) 2μm/pulse
Resolution (Full) 1μm/pulse
Minimum Incremental Motion (refurence) 0.2μm
MAX Speed 10mm/sec
Positional Repeatability 5μm
Load Capacity 39.2N(4.0kgf)
Lost Motion 3μm
Sensor Part Number GN-PT5M3B-1 (Metrol Co., Ltd.)
Limit Sensor Vacuum touch sensor (NORMAL CLOSE)
Origin Sensor None
Proximity Origin Sensor None
i
Motorized Single Axis Stage Series 20 Travel 85mm for Vacuum
VSGSP20-85(X)
85mm 39.2N (4.0kg)
6-12 weeks
$7,752.00
Travel 85mm
Stage Size 60×60mm
Feed Screw Precision ground screw φ6mm、 1mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium・Stainless steel
Finish None
Resolution (Half) 2μm/pulse
Resolution (Full) 1μm/pulse
Minimum Incremental Motion (refurence) 0.2μm
MAX Speed 10mm/sec
Positional Repeatability 5μm
Load Capacity 39.2N(4.0kgf)
Lost Motion 3μm
Sensor Part Number GN-PT5M3B-1 (Metrol Co., Ltd.)
Limit Sensor Vacuum touch sensor (NORMAL CLOSE)
Origin Sensor None
Proximity Origin Sensor None
i
Vacuum Compatible Miniature Motorized Stages
VTAMM60S-20X
20mm 29.4N (3.0kg)
6-12 weeks
$4,896.00
Travel 20mm
Stage Size 60×60mm
Feed Screw Precision ground screw φ4mm、0.5mm lead
Positioning Slide Crossed roller
Stage Material Aluminium
Finish None
Resolution (Half) 1μm/pulse
Resolution (Full) 0.5μm/pulse
MAX Speed 5mm/sec
Positional Repeatability 6μm
Load Capacity 29.4N(3.0kgf)
Lost Motion 5μm
Censer type GN-PT5M3B-1 (Metrol Co., Ltd.)
Limit Sensor Vacuum touch sensor (NORMAL CLOSE)
Origin Sensor None
Proximity Origin Sensor None
i
Motorized Single Axis Stage Series 26 Travel 200mm for Vacuum
VSGSP26-200(X)
200mm 58.8N (6.0kg)
6-12 weeks
$8,160.00
Travel 200mm
Stage Size 80×80mm
Feed Screw Precision ground screw φ8mm、 2mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium・Stainless steel
Finish None
Resolution (Half) 4μm/pulse
Resolution (Full) 2μm/pulse
Minimum Incremental Motion (refurence) 0.2μm
MAX Speed 20mm/sec
Positional Repeatability 10μm
Load Capacity 58.8N(6.0kgf)
Lost Motion 10μm
Sensor Part Number GN-PT5M3B-1 (Metrol Co., Ltd.)
Limit Sensor Vacuum touch sensor (NORMAL CLOSE)
Origin Sensor None
Proximity Origin Sensor None

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◦Linear stages have available travel between 35 − 200mm and has a similar footprint to the SGSP series.

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