Opto Sigma

• Long travel up to 100um
• Theoretical resolution less than 1nm
• RS-232C, GP-IB and USB interface with Fine series controllers
• Software available for easy PC control and data acquisition
• Adapters available for Olympus, Nikon and Mitutoyo objectives

These objective lens holders with piezo actuators provide compact, quick motion and high-resoulution nano-positioning. When used with our FINE controller and your selected software they provide the performance and stability needed in your application.

With resolution of less than 1nm and travel up to 100 microns they are ideal for a wide range of applications. They can be used in a scanning interferometer, surface structure analysis, auto focus system, confocal microscopy, biotechnology and semiconductor test equipment.

• Compact, modular design
• X, XY, XYZ, 2-axis tilt and rotation available
• Unique F/D digital closed loop sensor
• Active error compensation for precise linear trajectory control
• New models include smaller 40mm sizes
• Improved resolution, stiffness, accuracy, linearity, load capacity and speed
• Compatible with our FINE series of controllers

• Precision XY positioning stage
• 50mm x 50mm aperture
• Software available for easy PC control and data acquisition
• RS-232C, GP-IB and USB interface
• Ideal for a wide range of applications

The XY piezo aperture stage provides high-resolution, nano-positioning with a 50mm x 50mm aperture. When used with our FINE controller and your selected software they provide the performance and stability needed by many applications.

The stage has resolution of less than 1nm and travel up to 100 microns and makes these stages ideal for a wide range of applications. Wide range of applications include: scanning microscopy, metrology, surface structure analysis, semiconductor test equipment, precision mask and wafer alignment, scanning interferometer, imaging, biotechnology systems.