XY-Axis Vacuum Compatible EXC™ Stainless Steel Stages

TSDS-2

XY-Axis Vacuum Compatible EXC™ Stainless Steel Stages
In stock
SKU
TSDS-2
TSDS stages are made for use in 1E-6 Torr vacuum or clean room environments and feature Opto Sigma's EXC™ precision bearing ways. These bearing ways are not separate parts, as with competing stages, but processed directly into the body and base of the stage resulting in the highest stiffness, straightness and smoothness of any stage on the market. They remain unmatched in overall performance to this day. TSDS stages are made completely from hardened 440C stainless steel for excellent cleanliness and corrosion resistance. Both the stage and the stainless steel micrometer head (included) have vented attachment holes and are lubricated with a high-grade vacuum grease (YVAC2).
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Name Stage Size Travel Load Capacity Mounting Thread Delivery Price Add to cart
i
XY Axis Stainless Steel Extended Contact Translation Stages
TSDS-252S
25×25mm ±3mm 49N (5.0kg)
6-12 weeks
$907.20
Stage Size 25×25mm
Micrometer Position Side
Travel ±3mm
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Load Capacity 49N(5.0kgf)
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 30″
Travel Accuracy / Yaw 25″
Max. Moment Capacity / Pitch 3.0N・m
Max. Moment Capacity / Roll 3.0N・m
Max. Moment Capacity / Yaw 1.5N・m
Moment Stiffness / Pitch 3.4″/N・cm
Moment Stiffness / Roll 3.4″/N・cm
Moment Stiffness / Yaw 4.0″/N・cm
Parallelism 50μm
Running Parallelism 20μm
Orthogonality 10μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, XY-Axis Stage, Center Micrometer, +/-6.5mm, M3 Threads
TSDS-402S
40×40mm ±6.5mm 147N (15.0kg) M3
in stock
$957.60
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 30″
Travel Accuracy / Yaw 25″
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Max. Moment Capacity / Yaw 2.5N・m
Moment Stiffness / Pitch 0.66″/N・cm
Moment Stiffness / Roll 0.66″/N・cm
Moment Stiffness / Yaw 0.8″/N・cm
Parallelism 30μm
Running Parallelism 20μm
Orthogonality 10μm
i
60X60mm EXC Bearing, Vacuum Compatible, Stainless Steel, XY-Axis Stage, Side Micrometer, +/-6.5mm, M4 Threads
TSDS-602S
60×60mm ±6.5mm 343N (35.0kg) M4
6-12 weeks
$1,033.20
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 25″
Travel Accuracy / Yaw 15″
Max. Moment Capacity / Pitch 6.4N・m
Max. Moment Capacity / Roll 6.4N・m
Max. Moment Capacity / Yaw 4.9N・m
Moment Stiffness / Pitch 0.41″/N・cm
Moment Stiffness / Roll 0.41″/N・cm
Moment Stiffness / Yaw 0.41″/N・cm
Parallelism 30μm
Running Parallelism 20μm
Orthogonality 10μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, XY-Axis Stage, Side Micrometer, +/-6.5mm, M6 Threads
TSDS-652S-M6
65×65mm ±6.5mm 343N (35.0kg) M6
in stock
$1,033.20
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 25″
Travel Accuracy / Yaw 15″
Max. Moment Capacity / Pitch 8,8N・m
Max. Moment Capacity / Roll 8,8N・m
Max. Moment Capacity / Yaw 4.9N・m
Moment Stiffness / Pitch 0.41″/N・cm
Moment Stiffness / Roll 0.41″/N・cm
Moment Stiffness / Yaw 0.41″/N・cm
Parallelism 50μm
Running Parallelism 20μm
Orthogonality 10μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, XY-Axis Stage, Center Micrometer, +/-6.5mm, M3 Threads
TSDS-402C
40×40mm ±6.5mm 147N (15.0kg) M3
in stock
$957.60
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 30″
Travel Accuracy / Yaw 25″
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Max. Moment Capacity / Yaw 2.5N・m
Moment Stiffness / Pitch 0.66″/N・cm
Moment Stiffness / Roll 0.66″/N・cm
Moment Stiffness / Yaw 0.8″/N・cm
Parallelism 30μm
Running Parallelism 20μm
Orthogonality 10μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, XY-Axis Stage, Center Micrometer, +/-6.5mm, 6-32 Threads
TSDS-402SUU
40×40mm ±6.5mm 147N (15.0kg) 6-32UNC
in stock
$957.60
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 30″
Travel Accuracy / Yaw 25″
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Max. Moment Capacity / Yaw 2.5N・m
Moment Stiffness / Pitch 0.66″/N・cm
Moment Stiffness / Roll 0.66″/N・cm
Moment Stiffness / Yaw 0.8″/N・cm
Parallelism 30μm
Running Parallelism 20μm
Orthogonality 10μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, XY-Axis Stage, Center Micrometer, +/-6.5mm, M6 Threads
TSDS-652C-M6
65×65mm ±6.5mm 343N (35.0kg) M6
in stock
$1,033.20
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 25″
Travel Accuracy / Yaw 15″
Max. Moment Capacity / Pitch 8,8N・m
Max. Moment Capacity / Roll 8,8N・m
Max. Moment Capacity / Yaw 4.9N・m
Moment Stiffness / Pitch 0.41″/N・cm
Moment Stiffness / Roll 0.41″/N・cm
Moment Stiffness / Yaw 0.41″/N・cm
Parallelism 50μm
Running Parallelism 20μm
Orthogonality 10μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, XY-Axis Stage, Side Micrometer, +/-6.5mm, 1/4-20 Threads
TSDS-652SUU
65×65mm ±6.5mm 343N (35.0kg) 1/4-20UNC
in stock
$1,033.20
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 25″
Travel Accuracy / Yaw 15″
Max. Moment Capacity / Pitch 8,8N・m
Max. Moment Capacity / Roll 8,8N・m
Max. Moment Capacity / Yaw 4.9N・m
Moment Stiffness / Pitch 0.41″/N・cm
Moment Stiffness / Roll 0.41″/N・cm
Moment Stiffness / Yaw 0.41″/N・cm
Parallelism 50μm
Running Parallelism 20μm
Orthogonality 10μm
i
XY Axis Stainless Steel Extended Contact Translation Stages
TSDS-252C
25×25mm ±3mm 49N (5.0kg)
2 weeks
$907.20
Stage Size 25×25mm
Micrometer Position Center
Travel ±3mm
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Load Capacity 49N(5.0kgf)
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 30″
Travel Accuracy / Yaw 25″
Max. Moment Capacity / Pitch 3.0N・m
Max. Moment Capacity / Roll 3.0N・m
Max. Moment Capacity / Yaw 1.5N・m
Moment Stiffness / Pitch 3.4″/N・cm
Moment Stiffness / Roll 3.4″/N・cm
Moment Stiffness / Yaw 4.0″/N・cm
Parallelism 50μm
Running Parallelism 20μm
Orthogonality 10μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, XY-Axis Stage, Center Micrometer, +/-6.5mm, 6-32 Threads
TSDS-402CUU
40×40mm ±6.5mm 147N (15.0kg) 6-32UNC
in stock
$957.60
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 30″
Travel Accuracy / Yaw 25″
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Max. Moment Capacity / Yaw 2.5N・m
Moment Stiffness / Pitch 0.66″/N・cm
Moment Stiffness / Roll 0.66″/N・cm
Moment Stiffness / Yaw 0.8″/N・cm
Parallelism 30μm
Running Parallelism 20μm
Orthogonality 10μm
i
60X60mm EXC Bearing, Vacuum Compatible, Stainless Steel, XY-Axis Stage, Center Micrometer, +/-6.5mm, M4 Threads
TSDS-602C
60×60mm ±6.5mm 343N (35.0kg) M4
2 weeks
$1,033.20
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 25″
Travel Accuracy / Yaw 15″
Max. Moment Capacity / Pitch 6.4N・m
Max. Moment Capacity / Roll 6.4N・m
Max. Moment Capacity / Yaw 4.9N・m
Moment Stiffness / Pitch 0.41″/N・cm
Moment Stiffness / Roll 0.41″/N・cm
Moment Stiffness / Yaw 0.41″/N・cm
Parallelism 30μm
Running Parallelism 20μm
Orthogonality 10μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, XY-Axis Stage, Center Micrometer, +/-6.5mm, 1/4-20 Threads
TSDS-652CUU
65×65mm ±6.5mm 343N (35.0kg) 1/4-20UNC
in stock
$1,033.20
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 25″
Travel Accuracy / Yaw 15″
Max. Moment Capacity / Pitch 8,8N・m
Max. Moment Capacity / Roll 8,8N・m
Max. Moment Capacity / Yaw 4.9N・m
Moment Stiffness / Pitch 0.41″/N・cm
Moment Stiffness / Roll 0.41″/N・cm
Moment Stiffness / Yaw 0.41″/N・cm
Parallelism 50μm
Running Parallelism 20μm
Orthogonality 10μm

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