Vacuum Compatible Motorized Rotation Stage

VSGSP-YAW

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VSGSP-YAW

Motorized SGSP-YAW rotation stages modified for use in high vacuum.

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Name Rotation Range Load Capacity Delivery Price Add to cart

Motorized Rotation Stage 60mm Size for Vacuum
VSGSP-60YAW

In the CW or CCW direction to ∞

29.4N (3.0kg)

6-12 weeks

$5,043.00

Rotation Range	In the CW or CCW direction to ∞
Stage Size	φ60mm
Travel Mechanism	Worm and worm wheel
Positioning Slide	Bearing method
Stage Material	Aluminium
Finish	None
Resolution (Half)	0.005°/pulse
Resolution (Full)	0.0025°/pulse
Minimum Incremental Motion (refurence)	0.5mdeg
MAX Speed	20°/sec
Positional Repeatability	0.02°
Load Capacity	29.4N(3.0kgf)
Lost Motion	0.05°
Censer type	None
Limit Sensor	None
Origin Sensor	None
Proximity Origin Sensor	None

Motorized Rotation Stage 120mm Size for Vacuum
VSGSP-120YAW

Counterclockwise CCW direction to ∞, Clockwise CW direction stops at near 0 degree (−2.5°)

98N (10.0kg)

2 weeks

$5,463.00

Rotation Range	Counterclockwise CCW direction to ∞, Clockwise CW direction stops at near 0 degree (−2.5°)
Stage Size	φ120mm
Travel Mechanism	Worm and worm wheel
Positioning Slide	Crossed roller
Stage Material	Aluminium・Stainless steel
Finish	None
Resolution (Half)	0.005°/pulse
Resolution (Full)	0.0025°/pulse
Minimum Incremental Motion (refurence)	0.5mdeg
MAX Speed	20°/sec
Positional Repeatability	0.02°
Load Capacity	98.0N(10.0kgf)
Lost Motion	0.05°
Censer type	GN-STM35A-1 (Metrol Co., Ltd.)
Limit Sensor	Vacuum touch sensor (NORMAL CLOSE)
Origin Sensor	None
Proximity Origin Sensor	None

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◦The φ60mm size is best suited for use in smaller chambers.
◦The φ120mm size has a high load capacity due the larger bearing and larger motor.