X-Axis Vacuum Compatible EXC Stainless Steel Stages

TSDS-1

X-Axis Vacuum Compatible EXC Stainless Steel Stages
In stock
SKU
TSDS-1
TSDS stages are made for use in 1E-6 Torr vacuum or cleanroom environments and feature Opto Sigma's EXC™ precision bearing ways. These bearing ways are not separate parts, as with competing stages, but processed directly into the body and base of the stage resulting in the highest stiffness, straightness and smoothness of any stage on the market. They remain unmatched in overall performance to this day. TSDS stages are made completely from hardened 440C stainless steel for excellent cleanliness and corrosion resistance. Both the stage and the stainless steel micrometer head (included) have vented attachment holes and are lubricated with a high-grade vacuum grease (YVAC2).
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Name Stage Size Travel Load Capacity Mounting Thread Delivery Price Add to cart
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60X60mm EXC Bearing, Vacuum Compatible, Stainless Steel, X-Axis Stage, Center Micrometer, +/-6.5mm, M4 Threads
TSDS-601C
60×60mm ±6.5mm 343N (35.0kg) M4
6-12 weeks
$543.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 25″
Travel Accuracy / Yaw 15″
Max. Moment Capacity / Pitch 6.4N・m
Max. Moment Capacity / Roll 6.4N・m
Max. Moment Capacity / Yaw 4.9N・m
Moment Stiffness / Pitch 0.2″/N・cm
Moment Stiffness / Roll 0.2″/N・cm
Moment Stiffness / Yaw 0.2″/N・cm
Parallelism 15μm
Running Parallelism 10μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, X-Axis Stage, Center Micrometer, +/-6.5mm, 1/4-20 Threads
TSDS-651CUU
65×65mm ±6.5mm 343N (35.0kg) 1/4-20UNC
in stock
$543.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 25″
Travel Accuracy / Yaw 15″
Max. Moment Capacity / Pitch 8.8N・m
Max. Moment Capacity / Roll 9.8N・m
Max. Moment Capacity / Yaw 4.9N・m
Moment Stiffness / Pitch 0.2″/N・cm
Moment Stiffness / Roll 0.2″/N・cm
Moment Stiffness / Yaw 0.2″/N・cm
Parallelism 30μm
Running Parallelism 10μm
i
25X25mm EXC Bearing, Vacuum Compatible, Stainless Steel, X-Axis Stage, Center Micrometer, +/-3mm, M2 Threads
TSDS-251S
25×25mm ±3mm 49N (5.0kg) M2
in stock
$476.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 35″
Travel Accuracy / Yaw 35″
Max. Moment Capacity / Pitch 3.0N・m
Max. Moment Capacity / Roll 3.7N・m
Max. Moment Capacity / Yaw 1.5N・m
Moment Stiffness / Pitch 1.8″/N・cm
Moment Stiffness / Roll 1.6″/N・cm
Moment Stiffness / Yaw 2.0″/N・cm
Parallelism 30μm
Running Parallelism 10μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, X-Axis Stage, Center Micrometer, +/-6.5mm, M3 Threads
TSDS-401S
40×40mm ±6.5mm 147N (15.0kg) M3
in stock
$503.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 30″
Travel Accuracy / Yaw 25″
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Max. Moment Capacity / Yaw 2.5N・m
Moment Stiffness / Pitch 0.36″/N・cm
Moment Stiffness / Roll 0.3″/N・cm
Moment Stiffness / Yaw 0.4″/N・cm
Parallelism 15μm
Running Parallelism 10μm
i
60X60mm EXC Bearing, Vacuum Compatible, Stainless Steel, X-Axis Stage, Side Micrometer, +/-6.5mm, M4 Threads
TSDS-601S
60×60mm ±6.5mm 343N (35.0kg) M4
6-12 weeks
$543.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 25″
Travel Accuracy / Yaw 15″
Max. Moment Capacity / Pitch 6.4N・m
Max. Moment Capacity / Roll 6.4N・m
Max. Moment Capacity / Yaw 4.9N・m
Moment Stiffness / Pitch 0.2″/N・cm
Moment Stiffness / Roll 0.2″/N・cm
Moment Stiffness / Yaw 0.2″/N・cm
Parallelism 15μm
Running Parallelism 10μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, X-Axis Stage, Side Micrometer, +/-6.5mm, M6 Threads
TSDS-651S-M6
65×65mm ±6.5mm 343N (35.0kg) M6
in stock
$543.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 25″
Travel Accuracy / Yaw 15″
Max. Moment Capacity / Pitch 8.8N・m
Max. Moment Capacity / Roll 9.8N・m
Max. Moment Capacity / Yaw 4.9N・m
Moment Stiffness / Pitch 0.2″/N・cm
Moment Stiffness / Roll 0.2″/N・cm
Moment Stiffness / Yaw 0.2″/N・cm
Parallelism 30μm
Running Parallelism 10μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, X-Axis Stage, Center Micrometer, +/-6.5mm, M3 Threads
TSDS-401C
40×40mm ±6.5mm 147N (15.0kg) M3
in stock
$503.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 30″
Travel Accuracy / Yaw 25″
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Max. Moment Capacity / Yaw 2.5N・m
Moment Stiffness / Pitch 0.36″/N・cm
Moment Stiffness / Roll 0.3″/N・cm
Moment Stiffness / Yaw 0.4″/N・cm
Parallelism 15μm
Running Parallelism 10μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, X-Axis Stage, Center Micrometer, +/-6.5mm, 6-32 Threads
TSDS-401SUU
40×40mm ±6.5mm 147N (15.0kg) 6-32UNC
in stock
$503.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 30″
Travel Accuracy / Yaw 25″
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Max. Moment Capacity / Yaw 2.5N・m
Moment Stiffness / Pitch 0.36″/N・cm
Moment Stiffness / Roll 0.3″/N・cm
Moment Stiffness / Yaw 0.4″/N・cm
Parallelism 15μm
Running Parallelism 10μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, X-Axis Stage, Center Micrometer, +/-6.5mm, M6 Threads
TSDS-651C-M6
65×65mm ±6.5mm 343N (35.0kg) M6
in stock
$543.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 25″
Travel Accuracy / Yaw 15″
Max. Moment Capacity / Pitch 8.8N・m
Max. Moment Capacity / Roll 9.8N・m
Max. Moment Capacity / Yaw 4.9N・m
Moment Stiffness / Pitch 0.2″/N・cm
Moment Stiffness / Roll 0.2″/N・cm
Moment Stiffness / Yaw 0.2″/N・cm
Parallelism 30μm
Running Parallelism 10μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, X-Axis Stage, Side Micrometer, +/-6.5mm, 1/4-20 Threads
TSDS-651SUU
65×65mm ±6.5mm 343N (35.0kg) 1/4-20UNC
in stock
$543.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 25″
Travel Accuracy / Yaw 15″
Max. Moment Capacity / Pitch 8.8N・m
Max. Moment Capacity / Roll 9.8N・m
Max. Moment Capacity / Yaw 4.9N・m
Moment Stiffness / Pitch 0.2″/N・cm
Moment Stiffness / Roll 0.2″/N・cm
Moment Stiffness / Yaw 0.2″/N・cm
Parallelism 30μm
Running Parallelism 10μm
i
25X25mm EXC Bearing, Vacuum Compatible, Stainless Steel, X-Axis Stage, Center Micrometer, +/-3mm, M2 Threads
TSDS-251C
25×25mm ±3mm 49N (5.0kg) M2
in stock
$476.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 30″
Travel Accuracy / Yaw 25″
Max. Moment Capacity / Pitch 3.0N・m
Max. Moment Capacity / Roll 3.7N・m
Max. Moment Capacity / Yaw 1.5N・m
Moment Stiffness / Pitch 1.8″/N・cm
Moment Stiffness / Roll 1.6″/N・cm
Moment Stiffness / Yaw 2.0″/N・cm
Parallelism 30μm
Running Parallelism 10μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, X-Axis Stage, Center Micrometer, +/-6.5mm, 6-32 Threads
TSDS-401CUU
40×40mm ±6.5mm 147N (15.0kg) 6-32UNC
6-12 weeks
$503.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 0.5μm
Travel Accuracy / Pitch 30″
Travel Accuracy / Yaw 25″
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Max. Moment Capacity / Yaw 2.5N・m
Moment Stiffness / Pitch 0.36″/N・cm
Moment Stiffness / Roll 0.3″/N・cm
Moment Stiffness / Yaw 0.4″/N・cm
Parallelism 15μm
Running Parallelism 10μm

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