Closed Feedback Loop & High Load Linear Stages 1 Axis (X/Y)

HST(GS)

Closed Feedback Loop & High Load Linear Stages 1 Axis (X/Y)
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HST(GS)
Linear scales consist of “scales” used as a ruler and a “detector” which obtains positional information from the scales.
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Name Travel Load Capacity Delivery Price Add to cart
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Precision Motorized Stages with built in Glass-scale Encoder
HST(GS)-100X
100mm 392N (40.0kg)
6-12 weeks
$5,814.00
Stage Size 165×220mm
Feed Screw Ball screw diameter φ10mm、2mm lead
Positioning Slide Crossed roller
Stage Material Steel
Resolution (Full) 4μm/pulse
Resolution (Half) 2μm/pulse
MAX Speed 10mm/sec
Positioning Accuracy 4μm
Positional Repeatability 0.5μm
Load Capacity 392N(40.0kgf)
Moment Stiffness / Pitch 0.01″/N・cm
Moment Stiffness / Yaw 0.01″/N・cm
Moment Stiffness / Roll 0.005″/N・cm
Lost Motion 0.5μm
Backlash 1μm
Parallelism 70μm
Running Parallelism 10μm
Pitch 20″
Yaw 20″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor Equipped (NORMAL OPEN)
i
Precision Motorized Stages with built in Glass-scale Encoder
HST(GS)-200X
200mm 392N (40.0kg)
6-12 weeks
$7,650.00
Stage Size 165×420mm
Feed Screw Ball screw diameter φ10mm、2mm lead
Positioning Slide Crossed roller
Stage Material Steel
Resolution (Full) 4μm/pulse
Resolution (Half) 2μm/pulse
MAX Speed 20mm/sec
Positioning Accuracy 5μm
Positional Repeatability 0.8μm
Load Capacity 392N(40.0kgf)
Moment Stiffness / Pitch 0.01″/N・cm
Moment Stiffness / Yaw 0.01″/N・cm
Moment Stiffness / Roll 0.005″/N・cm
Lost Motion 0.5μm
Backlash 1μm
Parallelism 100μm
Running Parallelism 20μm
Pitch 20″
Yaw 20″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor Equipped (NORMAL OPEN)
i
Precision Motorized Stages with built in Glass-scale Encoder
HST(GS)-50X
50mm 392N (40.0kg)
2 weeks
$5,100.00
Stage Size 165×165mm
Feed Screw Ball screw diameter φ10mm、2mm lead
Positioning Slide Crossed roller
Stage Material Steel
Resolution (Full) 4μm/pulse
Resolution (Half) 2μm/pulse
MAX Speed 10mm/sec
Positioning Accuracy 3μm
Positional Repeatability 0.5μm
Load Capacity 392N(40.0kgf)
Moment Stiffness / Pitch 0.01″/N・cm
Moment Stiffness / Yaw 0.01″/N・cm
Moment Stiffness / Roll 0.005″/N・cm
Lost Motion 0.5μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor Equipped (NORMAL OPEN)

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◦Linear scales are used in indispensable processes in many fields, and mainly used in equipment for manufacturing electronic devices such as semiconductors, flat panel displays (FPD), and printed wiring boards, electronic component mounting machine, machine tools, and carrier machine.

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