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Closed Feedback Loop Translation Motorized Stages 1 Axis (X/Y)

OSMS(CS)-X

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Closed Feedback Loop Translation Motorized Stages 1 Axis (X/Y)
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SKU
OSMS(CS)-X
Long travel, high stiffness precision motorized stages with built-in compact optical scales make highly accurate and reliable full closed loop system using Sigma-Koki controllers
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i
Motorized Single Axis Stage Enclosed Ball Screw Series 26 Travel 200mm M6 Thread with Encoder
OSMS(CS)26-200(X)-M6 		200mm 117N (12.0kg)
6-12 weeks
$2,395.00
Travel 200mm
Stage Size 120×120mm
Feed Screw Ball screw diameter φ8mm、2mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 4μm/pulse
Resolution (Half) 2μm/pulse
MAX Speed 30mm/sec
Positioning Accuracy 15μm
Positional Repeatability 3μm
Load Capacity 117N(12.0kgf)
Moment Stiffness / Pitch 0.23″/N･cm
Moment Stiffness / Yaw 0.12″/N･cm
Moment Stiffness / Roll 0.2″/N･cm
Lost Motion 5μm
Backlash 3μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 30″
Yaw 25″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor Equipped (NORMAL OPEN)
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 33 Travel 300mm M6 Thread with Encoder
OSMS(CS)33-300(X)-M6 		300mm 196N (20.0kg)
6-12 weeks
$4,181.00
Travel 300mm
Stage Size 120×120mm
Feed Screw Ball screw diameter φ10mm、10mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 20μm/pulse
Resolution (Half) 10μm/pulse
MAX Speed 100mm/sec
Positioning Accuracy 25μm
Positional Repeatability 5μm
Load Capacity 196N(20.0kgf)
Moment Stiffness / Pitch 0.12″/N･cm
Moment Stiffness / Yaw 0.08″/N･cm
Moment Stiffness / Roll 0.1″/N･cm
Lost Motion 5μm
Backlash 3μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 25″
Yaw 20″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL CLOSE)
Proximity Origin Sensor Equipped (NORMAL OPEN)
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 33 Travel 500mm M6 Thread with Encoder
OSMS(CS)33-500(X)-M6 		500mm 196N (20.0kg)
2 weeks
$4,602.00
Travel 500mm
Stage Size 120×120mm
Feed Screw Ball screw diameter φ10mm、10mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 20μm/pulse
Resolution (Half) 10μm/pulse
MAX Speed 100mm/sec
Positioning Accuracy 25μm
Positional Repeatability 5μm
Load Capacity 196N(20.0kgf)
Moment Stiffness / Pitch 0.12″/N･cm
Moment Stiffness / Yaw 0.08″/N･cm
Moment Stiffness / Roll 0.1″/N･cm
Lost Motion 5μm
Backlash 3μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 30″
Yaw 25″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL CLOSE)
Proximity Origin Sensor Equipped (NORMAL OPEN)
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 20 Travel 35mm Inch Thread with Encoder
OSMS(CS)20-35(X)-INCH 		±35mm 78.4N (8.0kg)
6-12 weeks
$1,765.00
Travel 35mm
Stage Size 85×85mm
Feed Screw Ball screw diameter φ6mm、1mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 2μm/pulse
Resolution (Half) 1μm/pulse
MAX Speed 25mm/sec
Positioning Accuracy 5μm
Positional Repeatability 2μm
Load Capacity 78.4N(8.0kgf)
Moment Stiffness / Pitch 0.4″/N･cm
Moment Stiffness / Yaw 0.25″/N･cm
Moment Stiffness / Roll 0.25″/N･cm
Lost Motion 3μm
Backlash 3μm
Parallelism 30μm
Running Parallelism 10μm
Pitch 30″
Yaw 20″
Sensor Part Number Micro photo sensor : GP1S097HCZ0F(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor None
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 20 Travel 85mm Inch Thread with Encoder
OSMS(CS)20-85(X)-INCH 		85mm 78.4N (8.0kg)
6-12 weeks
$1,870.00
Travel 85mm
Stage Size 85×85mm
Feed Screw Ball screw diameter φ6mm、1mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 2μm/pulse
Resolution (Half) 1μm/pulse
MAX Speed 25mm/sec
Positioning Accuracy 10μm
Positional Repeatability 2μm
Load Capacity 78.4N(8.0kgf)
Moment Stiffness / Pitch 0.4″/N･cm
Moment Stiffness / Yaw 0.25″/N･cm
Moment Stiffness / Roll 0.35″/N･cm
Lost Motion 3μm
Backlash 3μm
Parallelism 30μm
Running Parallelism 10μm
Pitch 30″
Yaw 20″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor Equipped (NORMAL OPEN)
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 26 Travel 100mm Inch Thread with Encoder
OSMS(CS)26-100(X)-INCH 		100mm 117N (12.0kg)
6-12 weeks
$2,185.00
Travel 100mm
Stage Size 120×120mm
Feed Screw Ball screw diameter φ8mm、2mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 4μm/pulse
Resolution (Half) 2μm/pulse
MAX Speed 30mm/sec
Positioning Accuracy 10μm
Positional Repeatability 3μm
Load Capacity 117N(12.0kgf)
Moment Stiffness / Pitch 0.23″/N･cm
Moment Stiffness / Yaw 0.12″/N･cm
Moment Stiffness / Roll 0.2″/N･cm
Lost Motion 3μm
Backlash 3μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 25″
Yaw 20″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor Equipped (NORMAL OPEN)
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 26 Travel 200mm Inch Thread with Encoder
OSMS(CS)26-200(X)-INCH 		200mm 117N (12.0kg)
2 weeks
$2,395.00
Travel 200mm
Stage Size 120×120mm
Feed Screw Ball screw diameter φ8mm、2mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 4μm/pulse
Resolution (Half) 2μm/pulse
MAX Speed 30mm/sec
Positioning Accuracy 15μm
Positional Repeatability 3μm
Load Capacity 117N(12.0kgf)
Moment Stiffness / Pitch 0.23″/N･cm
Moment Stiffness / Yaw 0.12″/N･cm
Moment Stiffness / Roll 0.2″/N･cm
Lost Motion 5μm
Backlash 3μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 30″
Yaw 25″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor Equipped (NORMAL OPEN)
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 33 Travel 300mm Inch Thread with Encoder
OSMS(CS)33-300(X)-INCH 		300mm 196N (20.0kg)
6-12 weeks
$4,602.00
Travel 300mm
Stage Size 120×120mm
Feed Screw Ball screw diameter φ10mm、10mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 20μm/pulse
Resolution (Half) 10μm/pulse
MAX Speed 100mm/sec
Positioning Accuracy 25μm
Positional Repeatability 5μm
Load Capacity 196N(20.0kgf)
Moment Stiffness / Pitch 0.12″/N･cm
Moment Stiffness / Yaw 0.08″/N･cm
Moment Stiffness / Roll 0.1″/N･cm
Lost Motion 5μm
Backlash 3μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 40″
Yaw 25″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL CLOSE)
Proximity Origin Sensor Equipped (NORMAL OPEN)
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 33 Travel 500mm Inch Thread with Encoder
OSMS(CS)33-500(X)-INCH 		500mm 196N (20.0kg)
6-12 weeks
$4,602.00
Travel 500mm
Stage Size 120×120mm
Feed Screw Ball screw diameter φ10mm、10mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 20μm/pulse
Resolution (Half) 10μm/pulse
MAX Speed 100mm/sec
Positioning Accuracy 25μm
Positional Repeatability 5μm
Load Capacity 196N(20.0kgf)
Moment Stiffness / Pitch 0.12″/N･cm
Moment Stiffness / Yaw 0.08″/N･cm
Moment Stiffness / Roll 0.1″/N･cm
Lost Motion 5μm
Backlash 3μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 30″
Yaw 25″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL CLOSE)
Proximity Origin Sensor Equipped (NORMAL OPEN)
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 20 Travel 35mm M4 Thread with Encoder
OSMS(CS)20-35(X) 		±35mm 78.4N (8.0kg)
2 weeks
$1,765.00
Travel 35mm
Stage Size 85×85mm
Feed Screw Ball screw diameter φ6mm、1mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 2μm/pulse
Resolution (Half) 1μm/pulse
MAX Speed 25mm/sec
Positioning Accuracy 5μm
Positional Repeatability 2μm
Load Capacity 78.4N(8.0kgf)
Moment Stiffness / Pitch 0.4″/N･cm
Moment Stiffness / Yaw 0.25″/N･cm
Moment Stiffness / Roll 0.25″/N･cm
Lost Motion 3μm
Backlash 3μm
Parallelism 30μm
Running Parallelism 10μm
Pitch 30″
Yaw 20″
Sensor Part Number Micro photo sensor : GP1S097HCZ0F(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor None
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 20 Travel 85mm M4 Thread with Encoder
OSMS(CS)20-85(X) 		85mm 78.4N (8.0kg)
6-12 weeks
$1,870.00
Travel 85mm
Stage Size 85×85mm
Feed Screw Ball screw diameter φ6mm、1mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 2μm/pulse
Resolution (Half) 1μm/pulse
MAX Speed 25mm/sec
Positioning Accuracy 10μm
Positional Repeatability 2μm
Load Capacity 78.4N(8.0kgf)
Moment Stiffness / Pitch 0.4″/N･cm
Moment Stiffness / Yaw 0.25″/N･cm
Moment Stiffness / Roll 0.35″/N･cm
Lost Motion 3μm
Backlash 3μm
Parallelism 30μm
Running Parallelism 10μm
Pitch 30″
Yaw 20″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor Equipped (NORMAL OPEN)
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 26 Travel 100mm M4 Thread with Encoder
OSMS(CS)26-100(X) 		100mm 117N (12.0kg)
2 weeks
$2,185.00
Travel 100mm
Stage Size 100×100mm
Feed Screw Ball screw diameter φ8mm、2mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 4μm/pulse
Resolution (Half) 2μm/pulse
MAX Speed 30mm/sec
Positioning Accuracy 10μm
Positional Repeatability 3μm
Load Capacity 117N(12.0kgf)
Moment Stiffness / Pitch 0.23″/N･cm
Moment Stiffness / Yaw 0.12″/N･cm
Moment Stiffness / Roll 0.2″/N･cm
Lost Motion 3μm
Backlash 3μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 25″
Yaw 20″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor Equipped (NORMAL OPEN)
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 26 Size Travel 200mm M4 Thread with Encoder
OSMS(CS)26-200(X) 		200mm 117N (12.0kg)
6-12 weeks
$2,395.00
Travel 200mm
Stage Size 100×100mm
Feed Screw Ball screw diameter φ8mm、2mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 4μm/pulse
Resolution (Half) 2μm/pulse
MAX Speed 30mm/sec
Positioning Accuracy 15μm
Positional Repeatability 3μm
Load Capacity 117N(12.0kgf)
Moment Stiffness / Pitch 0.23″/N･cm
Moment Stiffness / Yaw 0.12″/N･cm
Moment Stiffness / Roll 0.2″/N･cm
Lost Motion 5μm
Backlash 3μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 30″
Yaw 25″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor Equipped (NORMAL OPEN)
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 33 Travel 300mm M4 Thread with Encoder
OSMS(CS)33-300(X) 		300mm 196N (20.0kg)
2 weeks
$4,181.00
Travel 300mm
Stage Size 120×120mm
Feed Screw Ball screw diameter φ10mm、10mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 20μm/pulse
Resolution (Half) 10μm/pulse
MAX Speed 100mm/sec
Positioning Accuracy 25μm
Positional Repeatability 5μm
Load Capacity 196N(20.0kgf)
Moment Stiffness / Pitch 0.12″/N･cm
Moment Stiffness / Yaw 0.08″/N･cm
Moment Stiffness / Roll 0.1″/N･cm
Lost Motion 5μm
Backlash 3μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 25″
Yaw 20″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL CLOSE)
Proximity Origin Sensor Equipped (NORMAL OPEN)
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 33 Travel 500mm M4 Thread with Encoder
OSMS(CS)33-500(X) 		500mm 196N (20.0kg)
2 weeks
$4,602.00
Travel 500mm
Stage Size 120×120mm
Feed Screw Ball screw diameter φ10mm、10mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 20μm/pulse
Resolution (Half) 10μm/pulse
MAX Speed 100mm/sec
Positioning Accuracy 25μm
Positional Repeatability 5μm
Load Capacity 196N(20.0kgf)
Moment Stiffness / Pitch 0.12″/N･cm
Moment Stiffness / Yaw 0.08″/N･cm
Moment Stiffness / Roll 0.1″/N･cm
Lost Motion 5μm
Backlash 3μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 30″
Yaw 25″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL CLOSE)
Proximity Origin Sensor Equipped (NORMAL OPEN)
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 20 Travel 35mm M6 Thread with Encoder
OSMS(CS)20-35(X)-M6 		±35mm 78.4N (8.0kg)
2 weeks
$1,765.00
Travel 35mm
Stage Size 85×85mm
Feed Screw Ball screw diameter φ6mm、1mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 2μm/pulse
Resolution (Half) 1μm/pulse
MAX Speed 25mm/sec
Positioning Accuracy 5μm
Positional Repeatability 2μm
Load Capacity 78.4N(8.0kgf)
Moment Stiffness / Pitch 0.4″/N･cm
Moment Stiffness / Yaw 0.25″/N･cm
Moment Stiffness / Roll 0.25″/N･cm
Lost Motion 3μm
Backlash 3μm
Parallelism 30μm
Running Parallelism 10μm
Pitch 30″
Yaw 20″
Sensor Part Number Micro photo sensor : GP1S097HCZ0F(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor None
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 20 Travel 85mm M6 Thread with Encoder
OSMS(CS)20-85(X)-M6 		85mm 78.4N (8.0kg)
2 weeks
$1,870.00
Travel 85mm
Stage Size 85×85mm
Feed Screw Ball screw diameter φ6mm、1mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 2μm/pulse
Resolution (Half) 1μm/pulse
MAX Speed 25mm/sec
Positioning Accuracy 10μm
Positional Repeatability 2μm
Load Capacity 78.4N(8.0kgf)
Moment Stiffness / Pitch 0.4″/N･cm
Moment Stiffness / Yaw 0.25″/N･cm
Moment Stiffness / Roll 0.35″/N･cm
Lost Motion 3μm
Backlash 3μm
Parallelism 30μm
Running Parallelism 10μm
Pitch 30″
Yaw 20″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor Equipped (NORMAL OPEN)
Scale head 0.5μm
i
Motorized Single Axis Stage Enclosed Ball Screw Series 26 Travel 100mm M6 Thread with Encoder
OSMS(CS)26-100(X)-M6 		100mm 117N (12.0kg)
2 weeks
$2,185.00
Travel 100mm
Stage Size 120×120mm
Feed Screw Ball screw diameter φ8mm、2mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 4μm/pulse
Resolution (Half) 2μm/pulse
MAX Speed 30mm/sec
Positioning Accuracy 10μm
Positional Repeatability 3μm
Load Capacity 117N(12.0kgf)
Moment Stiffness / Pitch 0.23″/N･cm
Moment Stiffness / Yaw 0.12″/N･cm
Moment Stiffness / Roll 0.2″/N･cm
Lost Motion 3μm
Backlash 3μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 25″
Yaw 20″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor Equipped (NORMAL OPEN)
Scale head 0.5μm

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◦U-shaped guide rail offers light weight, and minimized deflection to achieve high stiffness.
◦Includes a compact scale built in while keeping the installation space the same as that of the equivalent open loop OSMS series.

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