XYZ-Axis Vacuum Compatible Horizontal Surface EXC Stainless Steel Stages

TSDS-5

XYZ-Axis Vacuum Compatible Horizontal Surface EXC Stainless Steel Stages
In stock
SKU
TSDS-5
These XYZ-axis stages have a horizontal mounting surface. They are made for use in 1E-6 Torr vacuum or clean room environments and feature Opto Sigma's EXC™ precision bearing ways. These bearing ways are not separate parts, as with competing stages, but processed directly into the body and base of the stage resulting in the highest stiffness, straightness and smoothness of any stage on the market. They remain unmatched in overall performance to this day. TSDS stages are made completely from hardened 440C stainless steel for excellent cleanliness and corrosion resistance. Both the stage and the stainless steel micrometer head (included) have vented attachment holes and are lubricated with a high-grade vacuum grease (YVAC2).
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Name Stage Size Travel Load Capacity Mounting Thread Delivery Price Add to cart
i
25X25mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, Center Micrometer, +/-3mm, M2 Threads
TSDS-255C
25×25mm XY axis±3mm Z axis±3mm 29.4N (3.0kg) M2
in stock
$1,667.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 5μm
Max. Moment Capacity / Pitch 1.0N・m
Max. Moment Capacity / Roll 1.0N・m
Moment Stiffness / Pitch 10.55″/N・cm
Moment Stiffness / Roll 10.55″/N・cm
Parallelism 130μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, Center Micrometer, +/-6.5/6.5/3.0mm, 6-32 Threads
TSDS-405CUU
40×40mm XY axis±6.5mm Z axis±3mm 88.3N (9.0kg) 6-32UNC
6-12 weeks
$1,760.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Moment Stiffness / Pitch 2.5″/N・cm
Moment Stiffness / Roll 2.5″/N・cm
Parallelism 130μm
i
60X60mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, Center Micrometer, +/-6.5/6.5/5.0mm, M4 Threads
TSDS-605C
60×60mm XY axis±6.5mm Z axis±5mm 147N (15.0kg) M4
6-12 weeks
$1,905.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Roll 6.9N・m
Moment Stiffness / Pitch 1.0″/N・cm
Moment Stiffness / Roll 1.0″/N・cm
Parallelism 130μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, Center Micrometer, +/-6.5/6.5/5.0mm, 1/4-20 Threads
TSDS-655CUU
65×65mm XY axis±6.5mm Z axis±5mm 147N (15.0kg) 1/4-20UNC
6-12 weeks
$1,905.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Roll 6.9N・m
Moment Stiffness / Pitch 1.0″/N・cm
Moment Stiffness / Roll 1.0″/N・cm
Parallelism 130μm
i
25X25mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, Side Micrometer, +/-3mm, M2 Threads
TSDS-255S
25×25mm XY axis±3mm Z axis±3mm 29.4N (3.0kg) M2
6-12 weeks
$1,667.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 5μm
Max. Moment Capacity / Pitch 1.0N・m
Max. Moment Capacity / Roll 1.0N・m
Moment Stiffness / Pitch 10.55″/N・cm
Moment Stiffness / Roll 10.55″/N・cm
Parallelism 130μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, Side Micrometer, +/-6.5/6.5/3.0mm, M3 Threads
TSDS-405S
40×40mm XY axis±6.5mm Z axis±3mm 88.3N (9.0kg) M3
6-12 weeks
$1,760.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Moment Stiffness / Pitch 2.5″/N・cm
Moment Stiffness / Roll 2.5″/N・cm
Parallelism 130μm
i
60X60mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, Side Micrometer, +/-6.5/6.5/5.0mm, M4 Threads
TSDS-605S
60×60mm XY axis±6.5mm Z axis±5mm 147N (15.0kg) M4
6-12 weeks
$1,905.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Roll 6.9N・m
Moment Stiffness / Pitch 1.0″/N・cm
Moment Stiffness / Roll 1.0″/N・cm
Parallelism 130μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, Side Micrometer, +/-6.5/6.5/5.0mm, M6 Threads
TSDS-655S-M6
65×65mm XY axis±6.5mm Z axis±5mm 147N (15.0kg) M6
6-12 weeks
$1,905.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Roll 6.9N・m
Moment Stiffness / Pitch 1.0″/N・cm
Moment Stiffness / Roll 1.0″/N・cm
Parallelism 130μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, Center Micrometer, +/-6.5/6.5/3.0mm, M3 Threads
TSDS-405C
40×40mm XY axis±6.5mm Z axis±3mm 88.3N (9.0kg) M3
in stock
$1,760.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Moment Stiffness / Pitch 2.5″/N・cm
Moment Stiffness / Roll 2.5″/N・cm
Parallelism 130μm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, Side Micrometer, +/-6.5/6.5/3.0mm, 6-32 Threads
TSDS-405SUU
40×40mm XY axis±6.5mm Z axis±3mm 88.3N (9.0kg) 6-32UNC
6-12 weeks
$1,760.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Moment Stiffness / Pitch 2.5″/N・cm
Moment Stiffness / Roll 2.5″/N・cm
Parallelism 130μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, Center Micrometer, +/-6.5/6.5/5.0mm, M6 Threads
TSDS-655C-M6
65×65mm XY axis±6.5mm Z axis±5mm 147N (15.0kg) M6
6-12 weeks
$1,905.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Roll 6.9N・m
Moment Stiffness / Pitch 1.0″/N・cm
Moment Stiffness / Roll 1.0″/N・cm
Parallelism 130μm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, Side Micrometer, +/-6.5/6.5/5.0mm, 1/4-20 Threads
TSDS-655SUU
65×65mm XY axis±6.5mm Z axis±5mm 147N (15.0kg) 1/4-20UNC
6-12 weeks
$1,905.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Roll 6.9N・m
Moment Stiffness / Pitch 1.0″/N・cm
Moment Stiffness / Roll 1.0″/N・cm
Parallelism 130μm

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