Motorized Stages

Guide

Piezo Guide

For the guide mechanism, Sigma fine stages adopted a guide system that utilizes elastic deformation of metals and a mechanism to increase deformation of piezo elements.
These originally designed stages achieved readable resolution of 10nm during closed loop control, ideal for uses that require high-speed high-precision positioning.

Structure of Sigma Fine Stage

Displacement Magnification Method

Piezo actuator and displacement magnification mechanism offer a large operating range.

Displacement Magnification Method Digital Sensor

Closed loop control is possible with a digital sensor that does not require any high precision analog amplifier or AD conversion circuit.

SFS-H Internal Structural Drawing SFS-H Internal Structural Drawing

Operating Environment of Sigma Fine Stage

Use fine stages within the following operating environment temperature range.
Contact us separately if you desire to use the stages outside the operating environment temperature range.

* Operating environment * Recommended environment
Temperature : 10°C - 30°C Temperature : 20°C ± 1°C
Humidity : 20% - 60% (without condensation) Humidity : 40% or lower

Since durability of piezo elements used in the SFS/SFS-H stage series will deteriorate in high humidity environments, use them in the above environments.

Sigma Fine System Chart

Sigma Fine System Chart

Accuracy Measurement Example : Sigma Fine Stage System SFS-H (Linear Stage)

High Speed Convergence Data High Speed Convergence Data

0⇔75µm pulse rate (16Hz)
Closed loop control
by SFS-H60X at 150g load

0⇒1µm step convergence data (15msec)
Closed loop control
by SFS-H60X at 150g load

Travel Travel

The following graph shows the hysteresis curve unique to piezo actuators during open loop control travel.

Linearity Linearity

0⇔80µm positional repeatability
50nm or lower
by SFS-H60X at 150g load

Positional Repeatability Positional Repeatability

0⇔80µm positional repeatability
50nm or lower
by SFS-H60X at 150g load

Characteristics of Fine Feed Characteristics of Fine Feed

Characteristics when feed amount is small in closed loop control. Hysteresis disappears in open loop control.

Straightness Straightness

Deviation from the straight line in the direction of travel.

Pitch Pitch

Tilt around the axis in the horizontal plane perpendicular to the direction of travel.

Characteristics of Yaw Characteristics of Yaw

Rotation around the axis in the vertical plane perpendicular to the direction of travel.

Follow-up example with Respect to Analog Input: SFS-H (Linear Stage) *Controlled by FINE-01γ

High Speed Convergence Data Input waveform: Navy/Output waveform: Light blue High Speed Convergence Data

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