Measurement of Goniometer Stage Accuracy
Positioning is performed multiple times from the same direction on any position of the stage, and the maximum value of the deviation amount with respect to the stop position is calculated. The maximum of those numerical values is taken to be positional repeatability.
The distance to the top surface of the table from the ideal rotation center.
The maximum deviation range from the ideal rotation center position when a gonio stage is moved throughout the full travel.
Positioning is performed multiple times in the (+) forward and (-) backward directions on any
position (e.g. both ends or center point) of the stage, and the mean value of the deviation amount
with respect to the stop position is calculated.
The maximum of the numerical values is taken to be lost motion.
The angular displacement of the stage when unit moment load is applied.
Minimum Incremental Motion（MIM）
The incremental when the stage is finely positioned at any three positions (center and both ends) is defined
as minimum incremental motion(MIM).
To verify the MIM, the stage is finely positioned at three positins in positive direction and negative direction of 10 points for linear stage. Or positioned in CCW direction and CW direction for rotation stage. Then the responsivity is observed.
A capacitance sensor for linear stage and auto collimater for rotation stage is used to observe the incrementally.