Motorized Stages

Guide

Accuracy Verification

Motorized stage accuracy is, in principle, confirmed in compliance with the JIS test code for machine tools (JIS B 6190).
In addition, all measuring instruments are traceable standard instruments compliant to the national standard.

Accuracy Verification
Category Measurement Item Device Used Standards
Linear Stage Positioning Accuracy Dynamic Calibrator
(HP5529A)
JIS B 6190
Positional Repeatability
Lost Motion
Running Parallelism Dial Indicator Company Standard
Pitch/Yaw Auto Collimator Company Standard

It has to be guaranteed that measured values and indicated values are within the specification range of international standard values. In other words, traceability must be ensured. JIS defined this traceability as “the capacity to trace measurement results back to the domestic measurement standards, with the use of measuring instruments that have gone through a sequence of calibrations with high-ranking standards.”

Linear Stage
Category Measurement Item Device Used Standards
Rotation Stage Positional Repeatability Rotary Encoder Company Standard
Lost Motion
Wobble Accuracy Dial Indicator Company Standard
Goniometer Stage Positional Repeatability Rotary Encoder Company Standard
Lost Motion
Rotation Center Height Three Dimensional Instrumentation Company Standard
Rotation Center Deviation Accuracy

Accuracy Check in Assembled State

We check accuracy of motorized stages as a single unit.
Regarding the accuracy check in assembled state, we need to confirm use conditions etc. Contact our International Sales Division separately.

Accuracy Check at Delivery Destination

We cannot conduct accuracy check at delivery destinations.
We will request a check from organizations such as Japan Quality Assurance Organization as necessary.
Contact our International Sales Division separately for more information.

Interpretation of the Specification Table

Interpretation of the Specification Table
  1. Part Number
  2. Opposite Model
    Mechanical Specifications
  3. Travel

    Indicates the full travel.

  4. Table Size

    Size of top table face.

  5. Feed Screw

    * Ball screw
    * Precision ground screws

  6. Positioning Slide

    * Outer rail structure
    * Crossed roller guide

  7. Stage Material

    Material used for the product.

  8. Weight

    Self weight of the product.

    Accuracy Specifications

    Refer to the accuracy verification page for more information.

  9. Resolution (Half)

    Travel per pulse for full step

    Resolution (Full)

    Travel per pulse for half step

  10. MAX Speed

    MAX speed of the product (maximum travel speed).

  11. Positioning Accuracy

    Deviation between the measured value and the target value at the positioning point.

  12. Positional Repeatability

    Deviation in stop positions when unidirectional positioning is performed multiple times.

  13. Load Capacity

    Load capacity at the center of the stage

  14. Moment Stiffness

    Stage strength against a load exerted at a position away from the center of the table top (the table center and the center of gravity of a work does not match).
    It indicates the degree of tilt of the table top (″) when 1N load is exerted at the position 1cm away from the center of the stage surface

    Pitch

    Stiffness in the direction of tilt around the axis in the horizontal plane perpendicular to the direction of travel when moving the stage for full travel.

    Yaw

    Stiffness in the direction of tilt around the axis in the vertical plane perpendicular to the direction of travel when moving the stage for full travel.

    Roll

    Stiffness in the direction of tilt around the axis in the horizontal plane parallel to the direction of travel when moving the stage for full travel.

  15. Lost Motion

    Deviation between the stop position of forward positioning and that of backward positioning.

  16. Backlash

    Deviation in each direction when a certain load is exerted in forward and backward directions at an arbitrary position on the stage.

  17. Parallelism

    The parallelism of the table fixed on the stage against the base plane.
    * Note that it is different from “Running Parallelism”.

  18. Running Parallelism

    Displacement in the vertical direction of the table during stage motion along the full travel.

  19. Orthogonality of Motion

    Working displacement in the direction perpendicular to the Y axis when referenced to the X axis motion of the XY axis stage.

  20. Perpendicularity of Motion

    Displacement between the Z axis stage and the perpendicular optical breadboard when moving the stage for full travel.

  21. Pitch

    Maximum angle displacement in the direction of tilt around the axis in the horizontal plane perpendicular to the direction of travel when moving the stage for full travel.

    Yaw

    Maximum angle displacement in the direction of tilt around the axis in the vertical plane perpendicular to the direction of travel when moving the stage for full travel.

    Sensor
  22. Sensor Part Number

    Sensor used for the product.

  23. Limit Sensor

    Indicates whether fitted with a limit sensor.

  24. Origin Sensor

    Indicates whether fitted with an origin sensor.

  25. Proximity Origin Sensor

    Indicates whether fitted with a proximity origin sensor.

    Motor Specifications
  26. Type

    Type of motor.

  27. Motor Part Number

    Part number of motor used for the product.

  28. Step Angle

    Step angle of the motor.

    Sensor Specifications
  29. Power Voltage
  30. Current Consumption

    Specifications of the sensor.

  31. Control Output
  32. Output Logic
    Compatible Driver / Controller
  33. Compatible Driver

    Driver/controller compatible with the product.

  34. Compatible Controller

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