Vacuum Guide for Stainless Steel Stages
The amount of gas emitted from a vacuum compatible manual stage was measured.
According to the analysis of gas, the gas consists mainly of water and hydrocarbon. It is assumed that moisture on the stage surface and part of the grease used as drive lubricating oil evaporated.
|Part Number||Emitted Amount of Gas Q
(after 40 minutes of emission)
Evaluation and Device Specifications
Exhaust system :
Turbo-Molecular Pump STP-301
Seiyu Instruments Inc. (Now Edwards Japan Limited)
Pumping speed: 300ℓ/sec
Mass spectroscope :
Quad Mass Spectrometer QME200
Mass range: 1 - 200amu
The following list shows major gases that appear for each mass number when mass peaks (mass spectra) of residual gas are measured, and their interpretations.
List of Residual Gas Spectra