Manual positioners

Guide

Definitions of Specifications and Terminology

Interpretation of the Specification Table

Specifications
Specifications
  1. Part Number
  2. Opposite Model
  3. Table Size
  4. Travel

    Indicated by plus and minus using the reference position of product (when the top and bottom plates are at the same position) as the reference position. (On the outline drawing in the catalog, travel in one direction is indicated by +mm and in the opposite direction is indicated by -mm with the outline drawing position as the reference position.)

    It indicates the full travel range, it the reference position can not be determined.

  5. Positioning Slide

    Extended Contact Ball Guide

    Crossed roller guide

    Dovetail Slide method

    Leadscrew driving method

    Lapping method

    V groove screw

    Special guide methods other than the ones listed on the left are available.

    Refer to the specification table of each product.

  6. Primary Material Finish

    Material used for the product and surface finishing.

  7. Lead of Actuator

    Change in position when the feed control
    (micrometer head, fine-pitch screw or the like) is turned one time.

  8. Micrometer Position

    Position of the micrometer with respect to the stage surface is indicated as center or side.

  9. Load Capacity

    Load capacity at the center of the stage (static load).
    * Please contact our International Sales Division if you require to use them above the ruted load capacity.

  10. Travel Accuracy : Straightness (units: µm)

    Indicates a deviation from the straight line connecting the start and end points of the full travel of a linear stage.

  11. Travel Accuracy : Pitch

    Indicates the degree of tilt around the axis in the horizontal plane perpendicular to the direction of travel when moving the stage for full travel.

  12. Travel Accuracy : Yaw

    Indicates the degree of tilt around the axis in the vertical plane perpendicular to the direction of travel when moving the stage for full travel.

    Travel Accuracy : Roll

    Indicates the degree of tilt around the axis in the horizontal plane parallel to the direction of travel when moving the stage for full travel.

  13. Max. Moment Capacity (units: N-m)

    Load capacity of the stage when a sample is placed away from the center of the stage.

  14. Moment Stiffness (units: "/N-m)

    Stage strength against a load exerted at a position away from the center of the table top (the table center and the center of gravity of a sample does not match).
    Indicates the degree of tilt of the table top (sec) when 1N load is exerted at the position 1cm away from the center of the stage surface.

  15. Parallelism

    Parallelism of the stage top surface against the stage bottom surface.

  16. Running Parallelism

    Parallelism of the stage top surface against the stage bottom surface when the stage is moved for full travel.

  17. Weight

    Self weight of the product.

Definition of Terms in the Specification Table

Straightness (horizontal direction) [Units: µm]
Straightness

Move the stage and stop it at regular intervals throughout the full travel of the stage.
At each point, measure the deviation from a reference position in the horizontal plane. The maximum deviation after correcting the deviation throughout the full travel to 0 is the straightness in the horizontal plane.

Straightness
Straightness (vertical direction) [Units: µm]
Straightness

Move the stage and stop it at regular intervals throughout the full travel of the stage.
At each point, measure the deviation from a reference position in the vertical plane. The maximum deviation after correcting the deviation throughout the full travel to 0 is the straightness in the vertical plane.

Straightness
Pitch [Units: ”]
Pitch

Move the stage and stop it at regular intervals throughout the full travel of the stage. At each point, measure the degree of tilt in the vertical plane. The maximum angular difference is the pitch.

Pitch
Yaw [Units: ”]
Yaw

Move the stage and stop it at regular intervals throughout the full travel of the stage. At each point, measure the degree of tilt in the horizontal plane. The maximum angular difference is the yaw.

Yaw
Parallelism [Units: µm]

Fix a test indicator on an optical breadboard, bring it into contact with the top surface of the stage, and measure while moving it over the whole surface of the stage. The maximum difference of the displacement value of the test indicator is the parallelism.

Parallelism
Running Parallelism [Units: µm]

Fix a stage on an optical breadboard. Fix a test indicator on the top surface of the stage, bring it into contact with the top surface of the optical breadboard, and measure while moving the stage for the full travel. The maximum difference of the displacement value of the test indicator is the running parallelism.

Parallelism
Eccentricity [Units: µm]

Fix a rotation stage on an optical breadboard.
Bring a test indicator into contact with the circumference of the rotation stage, and measure while turning the stage through one full rotation of 360°. Half of the maximum difference of the displacement value of the test indicator (misalignment) is the eccentricity.

Eccentricity
Wobble [Units: µm]

Fix a test indicator on an optical breadboard, bring it into contact with the edge of the top surface of a rotation stage, and measure while turning the stage for through one full rotation of 360°.
The maximum difference of the displacement value of the test indicator is the wobble.

Wobble

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