Low Profile, Horizontal Platform Vertical Travel Motor Stages

OSMS-ZFW

Low Profile, Horizontal Platform Vertical Travel  Motor Stages
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OSMS-ZFW
40% lower profile compared to standard ZF stages. ZFW stages are Z axis stepping motor driven stages for measurement and inspection, offering high stiffness and high precision.
The mounting platform is oriented parallel to the base and is perpendicular to the direction of travel.
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Name Stage Size Travel Load Capacity Mounting Thread Delivery Price Add to cart
i
65mm Platform, Low-Profile Motorized Z-Axis, Vertical Travel Stage, 5mm Travel, 1/4-20 Threads
OSMS65-5ZFW-INCH
65×65mm 5mm 58.8N (6.0kg) 1/4-20UNC
6-12 weeks
$2,250.00
Travel 5mm
Feed Screw Ball screw diameter φ6mm、1mm lead
Positioning Slide Crossed roller/Linear Shaft
Z Travel Mechanism (reduction ratio) Wedge method (1:5)
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 0.4um/pulse
Resolution (Half) 0.2um/pulse
MAX Speed 1.5mm/sec
Positional Repeatability 1um
Moment Stiffness / Pitch, Rioll 1.5arcsec/N-cm
Moment Stiffness / Yaw 1.0arcsec/N-cm
Lost Motion 2um
Parallelism 50um
Running Parallelism 15um
Pitch/Yaw 30arcsec
Sensor Part Number Micro photo sensor GP1S097HCZ(Sharp Corporation), Limit sensor
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor None
Motor Type 5-Phase Stepper, (0.5A/Ph, 0.72 deg. step angle)
i
120mm Platform, Low-Profile Motorized Z-Axis, Vertical Travel Stage, 5mm Travel, M6 Threads
OSMS120-5ZFW-M6
120×120mm 5mm 98N (10.0kg) M6
6-12 weeks
$3,150.00
Travel 5mm
Feed Screw Ball screw diameter φ6mm、1mm lead
Positioning Slide Crossed roller/Linear Shaft
Z Travel Mechanism (reduction ratio) Wedge method (1:5)
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 0.4um/pulse
Resolution (Half) 0.2um/pulse
MAX Speed 1.5mm/sec
Positional Repeatability 1um
Moment Stiffness / Pitch, Rioll 1.5arcsec/N-cm
Moment Stiffness / Yaw 1.0arcsec/N-cm
Lost Motion 2um
Parallelism 50um
Running Parallelism 15um
Pitch/Yaw 30arcsec
Sensor Part Number Micro photo sensor GP1S097HCZ(Sharp Corporation), Limit sensor
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor None
Motor Type 5-Phase Stepper, (0.5A/Ph, 0.72 deg. step angle)
i
65mm Platform, Low-Profile Motorized Z-Axis, Vertical Travel Stage, 5mm Travel, M6 Threads
OSMS65-5ZFW-M6
65×65mm 5mm 58.8N (6.0kg) M6
6-12 weeks
$2,250.00
Travel 5mm
Feed Screw Ball screw diameter φ6mm、1mm lead
Positioning Slide Crossed roller/Linear Shaft
Z Travel Mechanism (reduction ratio) Wedge method (1:5)
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 0.4um/pulse
Resolution (Half) 0.2um/pulse
MAX Speed 1.5mm/sec
Positional Repeatability 1um
Moment Stiffness / Pitch, Rioll 1.5arcsec/N-cm
Moment Stiffness / Yaw 1.0arcsec/N-cm
Lost Motion 2um
Parallelism 50um
Running Parallelism 15um
Pitch/Yaw 30arcsec
Sensor Part Number Micro photo sensor GP1S097HCZ(Sharp Corporation), Limit sensor
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor None
Motor Type 5-Phase Stepper, (0.5A/Ph, 0.72 deg. step angle)
i
120mm Platform, Low-Profile Motorized Z-Axis, Vertical Travel Stage, 5mm Travel, 1/4-20 Threads
OSMS120-5ZFW-INCH
120×120mm 5mm 98N (10.0kg) 1/4-20UNC
6-12 weeks
$3,150.00
Travel 5mm
Feed Screw Ball screw diameter φ6mm、1mm lead
Positioning Slide Crossed roller/Linear Shaft
Z Travel Mechanism (reduction ratio) Wedge method (1:5)
Stage Material Aluminium
Finish Black anodized
Resolution (Full) 0.4um/pulse
Resolution (Half) 0.2um/pulse
MAX Speed 1.5mm/sec
Positional Repeatability 1um
Moment Stiffness / Pitch, Rioll 1.5arcsec/N-cm
Moment Stiffness / Yaw 1.0arcsec/N-cm
Lost Motion 2um
Parallelism 50um
Running Parallelism 15um
Pitch/Yaw 30arcsec
Sensor Part Number Micro photo sensor GP1S097HCZ(Sharp Corporation), Limit sensor
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor None
Motor Type 5-Phase Stepper, (0.5A/Ph, 0.72 deg. step angle)

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