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SKU
SFS-H
Nanometer resolution high stiffness flexure stages.

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Attention ▶The travel at closed loop control is reduced to around 20% less than at open loop control.
Name | Travel (at open-loop control) | Load Capacity | Delivery | Price | Add to cart | |||||||||||||||||||||||
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Piezo Flexure Vertical Axis Stage 40mm Size
SFS-H40Z(CL) |
100μm±15% | 6.7N (0.7kg) |
6-12 weeks
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$2,601.00
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Piezo Flexure Two Axis Stage 60mm Size
SFS-H60XY(CL) |
100μm±15% | 14.7N (1.5kg) |
6-12 weeks
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$5,098.00
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Piezo Flexure Single Axis Stage 60mm Size
SFS-H60X(CL) |
100μm±15% | 19.6N (2.0kg) |
6-12 weeks
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$2,601.00
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Piezo Flexure Three Axis Stage 60mm Size
SFS-H60XYZ(CL) |
100μm±15% | 9.8N (1.0kg) |
6-12 weeks
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$5,826.00
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Piezo Flexure Single Axis Stage 40mm Size
SFS-H40X(CL) |
90μm±15% | 9.8N (1.0kg) |
6-12 weeks
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$2,601.00
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Piezo Flexure Vertical Axis Stage 60mm Size
SFS-H60Z(CL) |
100μm±15% | 9.8N (1.0kg) |
6-12 weeks
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$2,809.00
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◦These compact piezo stages offer high precision and high resolution positioning by utilizing full closed loop control with digital frequency based sensors.
◦Using piezo element actuators, open loop travel between 90μm − 100μm is available, with minimum incremental motion as small as 1nm. Compared to the open-loop control, the maximum travel of closed-loop control will be less about 10%.
◦Closed loop travel is 80% of the open loop maximum and closed loop resolution is 10nm.
◦Recommended controllers are the FINE series controllers. Both digital and analog inputs are available.
◦Using piezo element actuators, open loop travel between 90μm − 100μm is available, with minimum incremental motion as small as 1nm. Compared to the open-loop control, the maximum travel of closed-loop control will be less about 10%.
◦Closed loop travel is 80% of the open loop maximum and closed loop resolution is 10nm.
◦Recommended controllers are the FINE series controllers. Both digital and analog inputs are available.