FS-SPX Dedicated Controller for 5nm Feedback Stage


FS-SPX Dedicated Controller for 5nm Feedback Stage
In stock
Dedicated controller for 5nm feedback stage (FS-SPX series) to control with 5nm resolution.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.
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5nm-Resolution Stage Controllers, 2-axes, for FS-SPX Series Stages
6-12 weeks
Number of Control Axes 2 axes
Minimum Command Unit 5nm
In Position Range +/- 5nm (+/- 15,+/- 35nm selectable)
Max Operating Speed Set Value 30mm/sec
Max Travel Range Set Value -671.088640~+671.088635mm
Number of Control Interface Port Jog Controller
Teaching Number of Register Channel
Power Voltage AC100 - 240V 50/60Hz
Power Supply Voltage Fluctuation Allowable Range AC90V - 264V
Power Consumption 110VA
Fuse 250V, 2.5A, time lag, 2
External Dimensions (W×H×D) W220×H88×D290mm
Weight 5.2㎏
Operating temperature/ Humidity 0℃ - 40℃/20% - 80%RH(without condensation)
Storage Temperature/ Humidity ー10℃ - 55℃/20% - 80%RH(without condensation)
Connectable Option JC-01
Communication Port GP-IB
General I/O Input
Emergency Stop Input B contact (fixed)

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