Closed Feedback Loop & High Load Linear Stages 1 Axis (X/Y)


Closed Feedback Loop & High Load Linear Stages 1 Axis (X/Y)
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Linear scales consist of “scales” used as a ruler and a “detector” which obtains positional information from the scales.
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Precision Motorized Stages with built in Glass-scale Encoder
50mm 392N (40.0kg)
2 weeks
Stage Size 165×165mm
Feed Screw Ball screw diameter φ10mm、2mm lead
Positioning Slide Crossed roller
Stage Material Steel
Resolution (Full) 4μm/pulse
Resolution (Half) 2μm/pulse
MAX Speed 10mm/sec
Positioning Accuracy 3μm
Positional Repeatability 0.5μm
Load Capacity 392N(40.0kgf)
Moment Stiffness / Pitch 0.01″/N・cm
Moment Stiffness / Yaw 0.01″/N・cm
Moment Stiffness / Roll 0.005″/N・cm
Lost Motion 0.5μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN)
Proximity Origin Sensor Equipped (NORMAL OPEN)

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◦Linear scales are used in indispensable processes in many fields, and mainly used in equipment for manufacturing electronic devices such as semiconductors, flat panel displays (FPD), and printed wiring boards, electronic component mounting machine, machine tools, and carrier machine.

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