Vacuum Compatible Linear Stages (1 and 2 axis)

Vacuum Compatible Linear Stages (1 and 2 axis)

Groups

Description

Travel Ranges

Platform Sizes

Load Capacity

Mounting Threads

Max. Speed

Repeatability

Minimum Incremental Motion

Axis Options

standard_grade_mounts
Vacuum Compatible Stages

Motorized VSGSP stages are modified for use in high vacuum. These linear stages have available travel between 35 − 200mm and have a similar footprint to the SGSP series.

35, 85, 200mm

  • 60X60
  • 80X80mm

39-59kg

Metric: M3, M4

10-20mm/sec

±2.5 - 5μm

0.2μm

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