Nano-Resolution Stage Systems

Nano-Resolution Stage Systems

Groups

Description

Travel Ranges

Platform Sizes

Load Capacity

Mounting Threads

Max. Speed

Repeatability

Minimum Incremental Motion

Axis Options

standard_grade_mounts
Nano-Resolution Stage Systems

FS- Stages have up to 1nm positioning resolution. In-house optical linear encoders are built-in at the center of stage to detect position which is achieved by feedback control using position information of the encoder. They are ideal for collecting the data over a wide range.

20, 50, 100, 150, 200, 300, 400mm

  • 60X60
  • 80X80
  • 120X120
  • 120X170
  • 160X230mm

5 – 10kg

Metric: M4, M6

5mm/sec

±0.002-0.010μm

0.001-0.050μm

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