5nm-Resolution Stage System

FS-SPX

5nm-Resolution Stage System
In stock
SKU
FS-SPX
FS-SPX is feedback stage with 5nm resolution positioning.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are two types of the stage which travel of 20mm and 50mm.
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Name Stage Size Delivery Price Add to cart
i
20mm Travel X-axis Motor Stage, 5nm resolution, 60X60mm, M4 Thd
FS-1020SPX
60×60mm
6-12 weeks
$4,590.00
Travel 20mm
Stage Size 60×60mm
Feed Screw Ball screw diameter φ4mm, 1mm lead
Weight 0.5㎏
Minimum Resolution *1 5nm
Positional Repeatability *1 ±10nm
Load Capacity 49N(5kgf)
Maximum Travel Speed 10μm
*1 Minimum resolution and position repeatability accuracy for built-in scale read.
Primary Material Aluminum
Finish Black anodized
Motor Type □28mm 5 phase stepping motor
Limit Sensor Equipped
Origin Sensor None
Proximity Origin Sensor None
Signal Cycle 2μm
Scale Cable* 2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.
Compatible Controller FC-611
Compatible Cable PM-CA-*
i
50mm Travel X-axis Motor Stage, 5nm resolution, 120X120mm, M4 Thd
FS-1050SPX
120×120mm
6-12 weeks
$5,610.00
Travel 50mm
Stage Size 120×120mm
Feed Screw Ball screw diameter φ6mm, 1mm lead
Weight 1.6㎏
Minimum Resolution *1 5nm
Positional Repeatability *1 ±10nm
Load Capacity 98N(10kgf)
Maximum Travel Speed 10μm
*1 Minimum resolution and position repeatability accuracy for built-in scale read.
Primary Material Aluminum
Finish Black anodized
Motor Type □28mm 5 phase stepping motor
Limit Sensor Equipped
Origin Sensor None
Proximity Origin Sensor None
Signal Cycle 2μm
Scale Cable* 2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.
Compatible Controller FC-611
Compatible Cable PM-CA-*

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