FS-SPX Dedicated Controller for 5nm Ｆeedback Stage
CONTROL_FS_SPX
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SKU
CONTROL_FS_SPX
Dedicated controller for 5nm feedback stage (FS-SPX series) to control with 5nm resolution.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.
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