XYZ-Axis Vacuum Compatible Vertical Surface EXC Stainless Steel Stages

TSDS-5L

XYZ-Axis Vacuum Compatible Vertical Surface EXC Stainless Steel Stages
In stock
SKU
TSDS-5L
These XYZ-axis stages have a vertical mounting surface. They are made for use in 1E-6 Torr vacuum or clean room environments and feature Opto Sigma's EXC™ precision bearing ways. These bearing ways are not separate parts, as with competing stages, but processed directly into the body and base of the stage resulting in the highest stiffness, straightness and smoothness of any stage on the market. They remain unmatched in overall performance to this day. TSDS stages are made completely from hardened 440C stainless steel for excellent cleanliness and corrosion resistance. Both the stage and the stainless steel micrometer head (included) have vented attachment holes and are lubricated with a high-grade vacuum grease (YVAC2).
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Name Stage Size Travel Load Capacity Mounting Thread Delivery Price Add to cart
i
60X60mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, (Vertical Platform) Center Micrometer, +/-6.5mm, M4 Threads
TSDS-605CL
60×60mm XY axis±6.5mm Z axis±6.5mm 49N (5.0kg) M4
6-12 weeks
$1,852.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 8.0N・m
Max. Moment Capacity / Roll 8.0N・m
Moment Stiffness / Pitch 0.58″/N・cm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, (Vertical Platform) XYZ-Axis Stage, Center Micrometer, +/-6.5mm, 1/4-20 Threads
TSDS-655CLUU
65×65mm XY axis±6.5mm Z axis±6.5mm 49N (5.0kg) 1/4-20UNC
in stock
$1,852.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 8.0N・m
Max. Moment Capacity / Roll 8.0N・m
Moment Stiffness / Pitch 0.58″/N・cm
i
25X25mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, (Vertical Platform) Side Micrometer, +/-3mm, M2 Threads
TSDS-255SL
25×25mm XY axis±3mm Z axis±3mm 14.7N (1.5kg) M2
2-3 weeks
$1,522.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 2.2N・m
Max. Moment Capacity / Roll 2.2N・m
Moment Stiffness / Pitch 6.7″/N・cm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, (Vertical Platform) Side Micrometer, +/-6.5/6.5/3.0mm, M3 Threads
TSDS-405SL
40×40mm XY axis±6.5mm Z axis±6.5mm 49N (5.0kg) M3
6-12 weeks
$1,667.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Moment Stiffness / Pitch 1.26″/N・cm
i
60X60mm EXC Bearing, Vacuum Compatible, Stainless Steel, (Vertical Platform) XYZ-Axis Stage, Side Micrometer, +/-6.5mm, M4 Threads
TSDS-605SL
60×60mm XY axis±6.5mm Z axis±6.5mm 49N (5.0kg) M4
6-12 weeks
$1,852.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 8.0N・m
Max. Moment Capacity / Roll 8.0N・m
Moment Stiffness / Pitch 0.58″/N・cm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, (Vertical Platform) Side Micrometer, +/-6.5mm, M6 Threads
TSDS-655SL-M6
65×65mm XY axis±6.5mm Z axis±6.5mm 49N (5.0kg) M6
in stock
$1,852.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 8.0N・m
Max. Moment Capacity / Roll 8.0N・m
Moment Stiffness / Pitch 0.58″/N・cm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, (Vertical Platform) Center Micrometer, +/-6.5mm, M3 Threads
TSDS-405CL
40×40mm XY axis±6.5mm Z axis±6.5mm 49N (5.0kg) M3
6-12 weeks
$1,667.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Moment Stiffness / Pitch 1.26″/N・cm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, (Vertical Platform) Side Micrometer, +/-6.5mm, 6-32 Threads
TSDS-405SLUU
40×40mm XY axis±6.5mm Z axis±6.5mm 49N (5.0kg) 6-32UNC
2-3 weeks
$1,323.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Moment Stiffness / Pitch 1.26″/N・cm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, (Vertical Platform) XYZ-Axis Stage, Center Micrometer, +/-6.5mm, M6 Threads
TSDS-655CL-M6
65×65mm XY axis±6.5mm Z axis±6.5mm 49N (5.0kg) M6
6-12 weeks
$1,852.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 8.0N・m
Max. Moment Capacity / Roll 8.0N・m
Moment Stiffness / Pitch 0.58″/N・cm
i
65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, (Vertical Platform) Side Micrometer, +/-6.5mm, 1/4-20 Threads
TSDS-655SLUU
65×65mm XY axis±6.5mm Z axis±6.5mm 49N (5.0kg) 1/4-20UNC
6-12 weeks
$1,852.00
Micrometer Position Side
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 8.0N・m
Max. Moment Capacity / Roll 8.0N・m
Moment Stiffness / Pitch 0.58″/N・cm
i
25X25mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, (Vertical Platform) Center Micrometer, +/-3mm, M2 Threads
TSDS-255CL
25×25mm XY axis±3mm Z axis±3mm 14.7N (1.5kg) M2
in stock
$1,522.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 2.2N・m
Max. Moment Capacity / Roll 2.2N・m
Moment Stiffness / Pitch 6.7″/N・cm
i
40X40mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, (Vertical Platform) Center Micrometer, +/-6.5mm, 6-32 Threads
TSDS-405CLUU
40×40mm XY axis±6.5mm Z axis±6.5mm 49N (5.0kg) 6-32UNC
in stock
$1,667.00
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 1μm
Max. Moment Capacity / Pitch 3.9N・m
Max. Moment Capacity / Roll 3.9N・m
Moment Stiffness / Pitch 1.26″/N・cm

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