
Piezo-Assist Linear Stages
Groups |
Description |
Travel Ranges |
Platform Sizes |
Load Capacity |
Mounting Threads |
Max. Speed |
Repeatability |
Minimum Incremental Motion |
Axis Options |
---|---|---|---|---|---|---|---|---|---|
![]() Piezo-Assist Stages |
TADC-SPA stages allow fine adjustment of 20nm or less by having a piezo assist mechanism integrated into the manual stage. They are ideal for manual stage units and systems that require high resolution position adjustment. |
6, 13mm |
|
4-5kg |
Metric: M3, M4 |
NA |
NA |
0.020μm |