Piezo-Assist Linear Stages

Piezo-Assist Linear Stages

Groups

Description

Travel Ranges

Platform Sizes

Load Capacity

Mounting Threads

Max. Speed

Repeatability

Minimum Incremental Motion

Axis Options

standard_grade_mounts
Piezo-Assist Stages

TADC-SPA stages allow fine adjustment of 20nm or less by having a piezo assist mechanism integrated into the manual stage. They are ideal for manual stage units and systems that require high resolution position adjustment.

6, 13mm

  • 25X25
  • 40X40
  • 60X60mm

4-5kg

Metric: M3, M4

NA

NA

0.020μm

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