Motorized Linear Stages

Motorized Linear Stages
  • Low Cost Linear Stages (1 Axis)

    Description

    Groups

    Description

    Travel Ranges

    Platform Sizes

    Load Capacity

    Mounting Threads

    Max. Speed

    Repeatability

    Minimum Incremental Motion

    Axis Options

    standard_grade_mounts
    Low-Cost Stages

    HPS motorized stages, with ball screws and extended contact bearings offer mid to upper level performance at a low price.

    20, 50, 60 mm

    • 60X60
    • 80X80
    • 120X120mm

    5 – 10kg

    Metric: M4

    10mm/sec

    ±1μm

    0.1μm

  • Compact Linear Stages (1 and 2 axis)

    Description

    Groups

    Description

    Travel Ranges

    Platform Sizes

    Load Capacity

    Mounting Threads

    Max. Speed

    Repeatability

    Minimum Incremental Motion

    Axis Options

    standard_grade_mounts
    Compact Stages

    TAMM motorized crossed roller stages combine compactness, low-profile, and high durability. They feature anti-creep crossed roller bearings, special nut-shape ball screw, and black anodized aluminum body.

    10, 15, 50, 100mm

    • 40X40
    • 60X60
    • 100X100
    • 100X175mm

    3 – 10kg

    Metric: M4

    10mm/sec

    ±1μm

    0.1-0.2μm

  • Standard Linear Stages (1, 2 and 3 axis)

    Description

    Groups

    Description

    Travel Ranges

    Platform Sizes

    Load Capacity

    Mounting Threads

    Max. Speed

    Repeatability

    Minimum Incremental Motion

    Axis Options

    standard_grade_mounts
    Standard Stages

    OSMS standard stepping motor driven stages have the most SKU options of all our stages. They are ideal for positioning of measuring instruments or inspection tools from which high stiffness and high precision are required.

    35, 50, 85, 100, 200, 300, 500mm

    • 85X85
    • 100X100
    • 100X175
    • 120X120mm

    3-20kg

    Metric: M4, M6 Imperial: ¼-20

    25-40mm/sec

    ±±1.5 - 3μm

    0.2-0.4μm

  • High Load Linear Stages (up to 40kg, 1, 2 and 3 axis)

    Description

    Groups

    Description

    Travel Ranges

    Platform Sizes

    Load Capacity

    Mounting Threads

    Max. Speed

    Repeatability

    Minimum Incremental Motion

    Axis Options

    standard_grade_mounts
    High Load Stages

    HST stages are fitted with precision ball screws and precision crossed roller. The combination of HST Series and 3 axis Stage Controllers HSC-103 can perform low-noise and low-vibration operation, compared with conventional products. Steel body offers excellent stiffness and high load capacity.

    50, 100, 200mm

    • 165X165
    • 165X220
    • 165X420mm

    40kg

    Metric: M4, M6

    10-20mm/sec

    ±1μm

    0.1μm

  • Closed Feedback Loop Linear Stages (1 Axis)

    Description

    Groups

    Description

    Travel Ranges

    Platform Sizes

    Load Capacity

    Mounting Threads

    Max. Speed

    Repeatability

    Minimum Incremental Motion

    Axis Options

    standard_grade_mounts
    Closed-Loop Feedback Stages

    OSMS(CS) closed loop motorized stages have optical scales making them a highly accurate and reliable system. The compact scale is built in to keep the envelope dimensions the same as that of the equivalent open loop OSMS series.

    35, 85, 100, 200, 300, 500mm

    • 85X85
    • 100X100
    • 120X120mm

    3-20kg

    Metric: M4, M6 Imperial: ¼-20

    25-100mm/sec

    ±1 - 1.5μm

    0.2-0.4μm

  • AC Servo Motor Motorized Stages

    Description

    Groups

    Description

    Travel Ranges

    Platform Sizes

    Load Capacity

    Mounting Threads

    Max. Speed

    Repeatability

    Minimum Incremental Motion

    Axis Options

    standard_grade_mounts
    AC Servo Motor Stages

    SGMV High accuracy / high stiffness stages are driven by AC servo motors. AC motors incorporate encoders for providing feedback and closed-loop control. These motors can be positioned to high accuracy.

    35, 85, 100, 200mm

    • 60X60
    • 80X80

    8-13kg

    Metric: M4, M6

    35mm/sec

    ±2μm - 3μm

    2μm

  • Vertical Flat Linear Stages

    Description

    Groups

    Description

    Travel Ranges

    Platform Sizes

    Load Capacity

    Mounting Threads

    Max. Speed

    Repeatability

    Minimum Incremental Motion

    Axis Options

    standard_grade_mounts
    Vertical Travel Flat Stages

    OSMS Z axis stages offer high stiffness and high precision. The mounting platform is oriented parallel to the base and is perpendicular to the direction of travel to minimize footprint.

    5, 10, 20mm

    • 40X40
    • 60X60
    • 80X80mm

    2-15kg

    Metric: M3, M4

    1-4mm/sec

    ±2.5μm

    0.05-0.10μm

  • Silent Ultrasonic Linear Stages

    Description

    Groups

    Description

    Travel Ranges

    Platform Sizes

    Load Capacity

    Mounting Threads

    Max. Speed

    Repeatability

    Minimum Incremental Motion

    Axis Options

    standard_grade_mounts
    Silent Ultrasonic Linear Stages

    PKA translation stages provide silent, high resolution position. While the drive source is a small ultrasonic motor, high load capacity of 2gk is ensured.

    15, 20mm

    • 40X40
    • 60X60mm

    2kg

    Metric: M3, M4

    0.5mm/sec

    3.5-16mm

    2μm

  • Fine Piezo Stages

    Description

    Groups

    Description

    Travel Ranges

    Platform Sizes

    Load Capacity

    Mounting Threads

    Max. Speed

    Repeatability

    Minimum Incremental Motion

    Axis Options

    standard_grade_mounts
    Fine Piezo Stages

    SFS piezo stages offer high precision and resolution positioning by utilizing full closed loop control with digital frequency based sensors. Using piezo element actuators, minimum incremental motion as small as 1nm.

    266, 355, 532nm

    • 40X40
    • 60X60mm

    7-15kg

    Metric: M3, M4

    NA

    ±0.05 μm

    0.001-0.050μm

  • Miniature Linear Stage (1 axis)

    Description

    Groups

    Description

    Travel Ranges

    Platform Sizes

    Load Capacity

    Mounting Threads

    Max. Speed

    Repeatability

    Minimum Incremental Motion

    Axis Options

    standard_grade_mounts
    Miniature Linear Stage

    These objectives are designed with compensation for cover glass-thickness aberrations, making it possible to realize ideal beam spot size and quality while processing thorough a cover glass. These objective lenses can be used for laser repair processing for LCD or OLED modules.

    10mm

    • 25X25mm

    2kg

    Metric: M2

    10mm/sec

    ±1.5 μm

    2μm

  • Vacuum Compatible Linear Stages (1 and 2 axis)

    Description

    Groups

    Description

    Travel Ranges

    Platform Sizes

    Load Capacity

    Mounting Threads

    Max. Speed

    Repeatability

    Minimum Incremental Motion

    Axis Options

    standard_grade_mounts
    Vacuum Compatible Stages

    Motorized VSGSP stages are modified for use in high vacuum. These linear stages have available travel between 35 − 200mm and have a similar footprint to the SGSP series.

    35, 85, 200mm

    • 60X60
    • 80X80mm

    39-59kg

    Metric: M3, M4

    10-20mm/sec

    ±2.5 - 5μm

    0.2μm

  • Piezo-Assist Linear Stages

    Description

    Groups

    Description

    Travel Ranges

    Platform Sizes

    Load Capacity

    Mounting Threads

    Max. Speed

    Repeatability

    Minimum Incremental Motion

    Axis Options

    standard_grade_mounts
    Piezo-Assist Stages

    TADC-SPA stages allow fine adjustment of 20nm or less by having a piezo assist mechanism integrated into the manual stage. They are ideal for manual stage units and systems that require high resolution position adjustment.

    6, 13mm

    • 25X25
    • 40X40
    • 60X60mm

    4-5kg

    Metric: M3, M4

    NA

    NA

    0.020μm

Selection Guide for Linear Motorized Stages

Groups

Description

Travel Ranges

Platform Sizes

Load Capacity

Mounting Threads

Max. Speed

Repeatability

Minimum Incremental Motion

Axis Options

standard_grade_mounts
Low-Cost Stages

HPS motorized stages, with ball screws and extended contact bearings offer mid to upper level performance at a low price.

20, 50, 60 mm

  • 60X60
  • 80X80
  • 120X120mm

5 – 10kg

Metric: M4

10mm/sec

±1μm

0.1μm

standard_grade_mounts
Compact Stages

TAMM motorized crossed roller stages combine compactness, low-profile, and high durability. They feature anti-creep crossed roller bearings, special nut-shape ball screw, and black anodized aluminum body.

10, 15, 50, 100mm

  • 40X40
  • 60X60
  • 100X100
  • 100X175mm

3 – 10kg

Metric: M4

10mm/sec

±1μm

0.1-0.2μm

standard_grade_mounts
Standard Stages

OSMS standard stepping motor driven stages have the most SKU options of all our stages. They are ideal for positioning of measuring instruments or inspection tools from which high stiffness and high precision are required.

35, 50, 85, 100, 200, 300, 500mm

  • 85X85
  • 100X100
  • 100X175
  • 120X120mm

3-20kg

Metric: M4, M6
Imperial: ¼-20

25-40mm/sec

±±1.5 - 3μm

0.2-0.4μm

standard_grade_mounts
High Load Stages

HST stages are fitted with precision ball screws and precision crossed roller. The combination of HST Series and 3 axis Stage Controllers HSC-103 can perform low-noise and low-vibration operation, compared with conventional products. Steel body offers excellent stiffness and high load capacity.

50, 100, 200mm

  • 165X165
  • 165X220
  • 165X420mm

40kg

Metric: M4, M6

10-20mm/sec

±1μm

0.1μm

standard_grade_mounts
Closed-Loop Feedback Stages

OSMS(CS) closed loop motorized stages have optical scales making them a highly accurate and reliable system. The compact scale is built in to keep the envelope dimensions the same as that of the equivalent open loop OSMS series.

35, 85, 100, 200, 300, 500mm

  • 85X85
  • 100X100
  • 120X120mm

3-20kg

Metric: M4, M6
Imperial: ¼-20

25-100mm/sec

±1 - 1.5μm

0.2-0.4μm

standard_grade_mounts
AC Servo Motor Stages

SGMV High accuracy / high stiffness stages are driven by AC servo motors. AC motors incorporate encoders for providing feedback and closed-loop control. These motors can be positioned to high accuracy.

35, 85, 100, 200mm

  • 60X60
  • 80X80

8-13kg

Metric: M4, M6

35mm/sec

±2μm - 3μm

2μm

standard_grade_mounts
Vertical Travel Flat Stages

OSMS Z axis stages offer high stiffness and high precision. The mounting platform is oriented parallel to the base and is perpendicular to the direction of travel to minimize footprint.

5, 10, 20mm

  • 40X40
  • 60X60
  • 80X80mm

2-15kg

Metric: M3, M4

1-4mm/sec

±2.5μm

0.05-0.10μm

standard_grade_mounts
Silent Ultrasonic Linear Stages

PKA translation stages provide silent, high resolution position. While the drive source is a small ultrasonic motor, high load capacity of 2gk is ensured.

15, 20mm

  • 40X40
  • 60X60mm

2kg

Metric: M3, M4

0.5mm/sec

3.5-16mm

2μm

standard_grade_mounts
Fine Piezo Stages

SFS piezo stages offer high precision and resolution positioning by utilizing full closed loop control with digital frequency based sensors. Using piezo element actuators, minimum incremental motion as small as 1nm.

266, 355, 532nm

  • 40X40
  • 60X60mm

7-15kg

Metric: M3, M4

NA

±0.05 μm

0.001-0.050μm

standard_grade_mounts
Miniature Linear Stage

These objectives are designed with compensation for cover glass-thickness aberrations, making it possible to realize ideal beam spot size and quality while processing thorough a cover glass. These objective lenses can be used for laser repair processing for LCD or OLED modules.

10mm

  • 25X25mm

2kg

Metric: M2

10mm/sec

±1.5 μm

2μm

standard_grade_mounts
Vacuum Compatible Stages

Motorized VSGSP stages are modified for use in high vacuum. These linear stages have available travel between 35 − 200mm and have a similar footprint to the SGSP series.

35, 85, 200mm

  • 60X60
  • 80X80mm

39-59kg

Metric: M3, M4

10-20mm/sec

±2.5 - 5μm

0.2μm

standard_grade_mounts
Piezo-Assist Stages

TADC-SPA stages allow fine adjustment of 20nm or less by having a piezo assist mechanism integrated into the manual stage. They are ideal for manual stage units and systems that require high resolution position adjustment.

6, 13mm

  • 25X25
  • 40X40
  • 60X60mm

4-5kg

Metric: M3, M4

NA

NA

0.020μm

*The indicated millimeter-to-inch diameter conversion values are rounded



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