5nm-Resolution Stage System

5nm-Resolution Stage System

SKU : FS-SPX

In stock
SKU
FS-SPX
FS-SPX is feedback stage with 5nm resolution positioning.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are two types of the stage which travel of 20mm and 50mm.
Name Stage Size Delivery Price Add to cart
50mm Travel X-axis Motor Stage, 5nm resolution, 120X120mm, M4 Thd
FS-1050SPX
120×120mm
3-6 weeks
$5,500.00
20mm Travel X-axis Motor Stage, 5nm resolution, 60X60mm, M4 Thd
FS-1020SPX
60×60mm
3-6 weeks
$4,500.00

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