Sigma Fine (Piezo) Stages (high stiffness type)

Sigma Fine (Piezo) Stages (high stiffness type)

SKU : SFS-H

In stock
SKU
SFS-H
Nanometer resolution high stiffness flexure stages.
Name Travel (at open-loop control) Load Capacity Delivery Price Add to cart
Piezo Flexure Single Axis Stage 60mm Size
SFS-H60X(CL)
100μm±15% 19.6N(2.0kg)
in stock
$2,500.00
Piezo Flexure Single Axis Stage 40mm Size
SFS-H40X(CL)
90μm±15% 9.8N(1.0kg)
3-6 weeks
$2,500.00
Piezo Flexure Vertical Axis Stage 60mm Size
SFS-H60Z(CL)
100μm±15% 9.8N(1.0kg)
3-6 weeks
$2,700.00
Piezo Flexure Vertical Axis Stage 40mm Size
SFS-H40Z(CL)
100μm±15% 6.7N(0.7kg)
3-6 weeks
$2,500.00

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◦These compact piezo stages offer high precision and high resolution positioning by utilizing full closed loop control with digital frequency based sensors.
◦Using piezo element actuators, open loop travel between 90μm − 100μm is available, with minimum incremental motion as small as 1nm. Compared to the open-loop control, the maximum travel of closed-loop control will be less about 10%.
◦Closed loop travel is 80% of the open loop maximum and closed loop resolution is 10nm.
◦Recommended controllers are the FINE series controllers.Both digital and analog inputs are available.