Sigma Fine (Piezo) Stages (high stiffness type)

SFS-H

Sigma Fine (Piezo) Stages (high stiffness type)
In stock
SKU
SFS-H
Nanometer resolution high stiffness flexure stages.
custom product
Customize product
Filters
Enabled filters :
Remove all filters

Attention ▶The travel at closed loop control is reduced to around 20% less than at open loop control.

Name Travel (at open-loop control) Load Capacity Delivery Price Add to cart
i
Piezo Flexure Single Axis Stage 40mm Size
SFS-H40X(CL)
90μm±15% 9.8N (1.0kg)
6-12 weeks
$2,601.00
Travel (at open-loop control) 90μm±15%
Stage Size 40×40mm
Actuator Piezo actuator
Theoretical Resolution (open-loop 1nm
Resolution (closed-loop) 10nm
Linearity <0.3%
Perpendicularity (Horizontal Direction) 1μm
Positional Repeatability <0.1μm
Load Capacity 9.8N(1.0kgf)
Micro-displacement Sensor Digital Sensor
Compatible Cable Attached cable (2m)
i
Piezo Flexure Vertical Axis Stage 60mm Size
SFS-H60Z(CL)
100μm±15% 9.8N (1.0kg)
6-12 weeks
$2,809.00
Travel (at open-loop control) 100μm±15%
Stage Size 60×60mm
Actuator Piezo actuator
Theoretical Resolution (open-loop 1nm
Resolution (closed-loop) 10nm
Linearity <0.3%
Perpendicularity (Horizontal Direction) 1μm
Positional Repeatability <0.1μm
Load Capacity 9.8N(1.0kgf)
Micro-displacement Sensor Digital Sensor
Compatible Cable FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
i
Piezo Flexure Vertical Axis Stage 40mm Size
SFS-H40Z(CL)
100μm±15% 6.7N (0.7kg)
6-12 weeks
$2,601.00
Travel (at open-loop control) 100μm±15%
Stage Size 40×40mm
Actuator Piezo actuator
Theoretical Resolution (open-loop 1nm
Resolution (closed-loop) 10nm
Linearity <0.3%
Perpendicularity (Horizontal Direction) 1μm
Positional Repeatability <0.1μm
Load Capacity 6.7N(0.7kgf)
Micro-displacement Sensor Digital Sensor
Compatible Cable Attached cable (2m)
i
Piezo Flexure Two Axis Stage 60mm Size
SFS-H60XY(CL)
100μm±15% 14.7N (1.5kg)
6-12 weeks
$5,098.00
Travel (at open-loop control) 100μm±15%
Stage Size 60×60mm
Actuator Piezo actuator
Theoretical Resolution (open-loop 1nm
Resolution (closed-loop) 10nm
Linearity <0.3%
Perpendicularity (Horizontal Direction) 1μm
Positional Repeatability <0.1μm
Load Capacity 14.7N(1.5kgf)
Micro-displacement Sensor Digital Sensor
Compatible Cable FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
i
Piezo Flexure Single Axis Stage 60mm Size
SFS-H60X(CL)
100μm±15% 19.6N (2.0kg)
6-12 weeks
$2,601.00
Travel (at open-loop control) 100μm±15%
Stage Size 60×60mm
Actuator Piezo actuator
Theoretical Resolution (open-loop 1nm
Resolution (closed-loop) 10nm
Linearity <0.3%
Perpendicularity (Horizontal Direction) 1μm
Positional Repeatability <0.1μm
Load Capacity 19.6N(2.0kgf)
Micro-displacement Sensor Digital Sensor
Compatible Cable FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
i
Piezo Flexure Three Axis Stage 60mm Size
SFS-H60XYZ(CL)
100μm±15% 9.8N (1.0kg)
6-12 weeks
$5,826.00
Travel (at open-loop control) 100μm±15%
Stage Size 60×60mm
Actuator Piezo actuator
Theoretical Resolution (open-loop 1nm
Resolution (closed-loop) 10nm
Linearity <0.5%
Perpendicularity (Horizontal Direction) 1μm
Positional Repeatability <0.15μm
Load Capacity 9.8N(1.0kgf)
Micro-displacement Sensor Digital Sensor
Compatible Cable FINE-CA-3: For piezo
DS1-CA-3: For digital sensor

You must be logged in to ask questions

◦These compact piezo stages offer high precision and high resolution positioning by utilizing full closed loop control with digital frequency based sensors.
◦Using piezo element actuators, open loop travel between 90μm − 100μm is available, with minimum incremental motion as small as 1nm. Compared to the open-loop control, the maximum travel of closed-loop control will be less about 10%.
◦Closed loop travel is 80% of the open loop maximum and closed loop resolution is 10nm.
◦Recommended controllers are the FINE series controllers. Both digital and analog inputs are available.

Click here to receive announcements and exclusive promotions

Remind me later

Thank you! Please check your email inbox to confirm.

Oops! Notifications are disabled.