1nm Feedback Stage - 175x100mm
NFS100-100UPX

High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
The 1 nm Feedback Stage is available in 6 different table sizes.
The 1 nm Feedback Stage is available in 6 different table sizes.
- Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected.
- A plugin for the "Autoconfig" function is equipped for user convenience.
- Controllers compatible with the Feedback Stage (NFS series) are available.
Name | 1nm Feedback Stage - 175x100mm |
---|---|
Weight | 3.7000kgs |
Guide |
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Remark |
*1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected.
*2 Values when the multi-point error compensation function is enabled. *3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a micro range. Measurement step for 1 nm feedback stage (NFS-UPX series): 5 nm |
Attention |
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Travel | 100mm |
Material | Aluminium |
Load Capacity | 98N (10.0kg) |
Stage Size | 175x100mm |
Finish | Black anodized |
Feed Screw | Ball screw diameter φ8mm, 1mm lead |
Positioning Slide | Crossed roller |
Resolution (Full) | 2μm/pulse *1 |
Resolution (Half) | 1μm/pulse *1 |
Positioning Accuracy | 2μm *2 |
Positional Repeatability | 0.4μm *2 |
Micro-range Bi-directional Repeatability | ±3nm *3 |
Minimal Incremental Motion | 3nm |
MAX Speed | 5mm/sec |
Moment Stiffness / Pitch | 0.05″/N・cm |
Moment Stiffness / Yaw | 0.05″/N・cm |
Moment Stiffness / Roll | 0.05″/N・cm |
Lost Motion | 0.4μm |
Backlash | 1μm |
Parallelism | 50μm |
Running Parallelism | 10μm |
Pitch | 15″ |
Yaw | 15″ |
Motor / Motor Type | 5-phase stepping motor 0.75A/phase(Oriental Motor Co., Ltd.) |
Motor / Motor Part Number | PK545NBW (□42mm) |
Scale Resolution | 1nm |
Out of stock
SKU
NFS100-100UPX
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
The 1 nm Feedback Stage is available in 6 different table sizes.
The 1 nm Feedback Stage is available in 6 different table sizes.