10nm-Resolution Stage System

FS-PX

10nm-Resolution Stage System
In stock
SKU
FS-PX
FS-PX is feedback stage with 10nm resolution positioning.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are five types of the stages. It is ideal for collecting the data in a wide range or for performing precise positioning and movement of a sample on a single stage by the large travel range.
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Name Stage Size Delivery Price Add to cart
i
50mm Travel X-axis Motor Stage, 10nm resolution, 120X120mm, M4 Thd
FS-1050PX
120×120mm
6-12 weeks
$4,774.00
Travel 50mm
Stage Size 120×120mm
Positioning Slide Crossed roller
Feed Screw Ball screw diameter φ6mm, 1mm lead
Weight 1.6㎏
Minimum Resolution *1 10nm
Positional Repeatability *1 ±20nm
Load Capacity 98N(10kgf)
Maximum Travel Speed 10μm
*1 Minimum resolution and position repeatability accuracy for built-in scale read.
i
200mm Travel X-axis Motor Stage, 10nm resolution, 160X230mm, M4 Thd
FS-3200PX
160×230mm
6-12 weeks
$8,168.00
Travel 200mm
Stage Size 160×230mm
Positioning Slide LM Guide
Feed Screw Ball screw diameter φ10mm, 2mm lead
Weight 5.0㎏
Minimum Resolution *1 10nm
Positional Repeatability *1 ±20nm
Load Capacity 196N(20kgf)
Maximum Travel Speed 10μm
*1 Minimum resolution and position repeatability accuracy for built-in scale read.
i
100mm Travel X-axis Motor Stage, 10nm resolution, 120X120mm, M4 Thd
FS-1100PX
120×120mm
6-12 weeks
$5,834.00
Travel 100mm
Stage Size 120×120mm
Positioning Slide LM Guide
Feed Screw Ball screw diameter φ6mm, 1mm lead
Weight 2.1㎏
Minimum Resolution *1 10nm
Positional Repeatability *1 ±20nm
Load Capacity 98N(10kgf)
Maximum Travel Speed 10μm
*1 Minimum resolution and position repeatability accuracy for built-in scale read.
i
20mm Travel X-axis Motor Stage, 10nm resolution, 60X60mm, M4 Thd
FS-1020PX
60×60mm
6-12 weeks
$3,713.00
Travel 20mm
Stage Size 60×60mm
Positioning Slide Crossed roller
Feed Screw Ball screw diameter φ4mm, 1mm lead
Weight 0.5㎏
Minimum Resolution *1 10nm
Positional Repeatability *1 ±20nm
Load Capacity 49N(5kgf)
Maximum Travel Speed 10μm
*1 Minimum resolution and position repeatability accuracy for built-in scale read.
i
150mm Travel X-axis Motor Stage, 10nm resolution, 120X170mm, M4 Thd
FS-3150PX
120×170mm
6-12 weeks
$7,956.00
Travel 150mm
Stage Size 120×170mm
Positioning Slide LM Guide
Feed Screw Ball screw diameter φ8mm, 1mm lead
Weight 2.8㎏
Minimum Resolution *1 10nm
Positional Repeatability *1 ±20nm
Load Capacity 98N(10kgf)
Maximum Travel Speed 10μm
*1 Minimum resolution and position repeatability accuracy for built-in scale read.

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