1nm-Resolution Stage System

1nm-Resolution Stage System

SKU : FS-UPX

In stock
SKU
FS-UPX
FS-UPX is feedback stage with 1nm resolution positioning.
FS-UPX series operates faster than high torque type FS-SPX series.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are two types of the stage which travel of 20mm and 50mm.
Name Stage Size Delivery Price Add to cart
20mm Travel X-axis Motor Stage, 1nm resolution, 60X60mm, M4 Thd
FS-1020UPX
60×60mm
3-6 weeks
$7,000.00
50mm Travel X-axis Motor Stage, 1nm resolution, 120X120mm, M4 Thd
FS-1050UPX
120×120mm
3-6 weeks
$8,000.00

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