Low Profile, Horizontal Platform Vertical Travel Motor Stages

OSMS-ZFW

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OSMS-ZFW

40% lower profile compared to standard ZF stages. ZFW stages are Z axis stepping motor driven stages for measurement and inspection, offering high stiffness and high precision.
The mounting platform is oriented parallel to the base and is perpendicular to the direction of travel.

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details

OSMS65-5ZFW-M6

65×65mm

5mm

58.8N (6.0kg)

6-12 weeks

$2,362.50

Travel	5mm
Feed Screw	Ball screw diameter φ6mm、1mm lead
Positioning Slide	Crossed roller/Linear Shaft
Z Travel Mechanism (reduction ratio)	Wedge method (1:5)
Stage Material	Aluminium
Finish	Black anodized
Resolution (Full)	0.4um/pulse
Resolution (Half)	0.2um/pulse
MAX Speed	1.5mm/sec
Positional Repeatability	1um
Moment Stiffness / Pitch, Rioll	1.5arcsec/N-cm
Moment Stiffness / Yaw	1.0arcsec/N-cm
Lost Motion	2um
Parallelism	50um
Running Parallelism	15um
Pitch/Yaw	30arcsec
Sensor Part Number	Micro photo sensor GP1S097HCZ(Sharp Corporation), Limit sensor
Limit Sensor	Equipped (NORMAL CLOSE)
Origin Sensor	Equipped (NORMAL OPEN)
Proximity Origin Sensor	None
Motor Type	5-Phase Stepper, (0.5A/Ph, 0.72 deg. step angle)

details

OSMS120-5ZFW-INCH

120×120mm

5mm

98N (10.0kg)

1/4-20UNC

6-12 weeks

$3,307.50

Travel	5mm
Feed Screw	Ball screw diameter φ6mm、1mm lead
Positioning Slide	Crossed roller/Linear Shaft
Z Travel Mechanism (reduction ratio)	Wedge method (1:5)
Stage Material	Aluminium
Finish	Black anodized
Resolution (Full)	0.4um/pulse
Resolution (Half)	0.2um/pulse
MAX Speed	1.5mm/sec
Positional Repeatability	1um
Moment Stiffness / Pitch, Rioll	1.5arcsec/N-cm
Moment Stiffness / Yaw	1.0arcsec/N-cm
Lost Motion	2um
Parallelism	50um
Running Parallelism	15um
Pitch/Yaw	30arcsec
Sensor Part Number	Micro photo sensor GP1S097HCZ(Sharp Corporation), Limit sensor
Limit Sensor	Equipped (NORMAL CLOSE)
Origin Sensor	Equipped (NORMAL OPEN)
Proximity Origin Sensor	None
Motor Type	5-Phase Stepper, (0.5A/Ph, 0.72 deg. step angle)

details

OSMS65-5ZFW-INCH

65×65mm

5mm

58.8N (6.0kg)

1/4-20UNC

6-12 weeks

$2,362.50

Travel	5mm
Feed Screw	Ball screw diameter φ6mm、1mm lead
Positioning Slide	Crossed roller/Linear Shaft
Z Travel Mechanism (reduction ratio)	Wedge method (1:5)
Stage Material	Aluminium
Finish	Black anodized
Resolution (Full)	0.4um/pulse
Resolution (Half)	0.2um/pulse
MAX Speed	1.5mm/sec
Positional Repeatability	1um
Moment Stiffness / Pitch, Rioll	1.5arcsec/N-cm
Moment Stiffness / Yaw	1.0arcsec/N-cm
Lost Motion	2um
Parallelism	50um
Running Parallelism	15um
Pitch/Yaw	30arcsec
Sensor Part Number	Micro photo sensor GP1S097HCZ(Sharp Corporation), Limit sensor
Limit Sensor	Equipped (NORMAL CLOSE)
Origin Sensor	Equipped (NORMAL OPEN)
Proximity Origin Sensor	None
Motor Type	5-Phase Stepper, (0.5A/Ph, 0.72 deg. step angle)

details

OSMS120-5ZFW-M6

120×120mm

5mm

98N (10.0kg)

2 weeks

$3,307.50

Travel	5mm
Feed Screw	Ball screw diameter φ6mm、1mm lead
Positioning Slide	Crossed roller/Linear Shaft
Z Travel Mechanism (reduction ratio)	Wedge method (1:5)
Stage Material	Aluminium
Finish	Black anodized
Resolution (Full)	0.4um/pulse
Resolution (Half)	0.2um/pulse
MAX Speed	1.5mm/sec
Positional Repeatability	1um
Moment Stiffness / Pitch, Rioll	1.5arcsec/N-cm
Moment Stiffness / Yaw	1.0arcsec/N-cm
Lost Motion	2um
Parallelism	50um
Running Parallelism	15um
Pitch/Yaw	30arcsec
Sensor Part Number	Micro photo sensor GP1S097HCZ(Sharp Corporation), Limit sensor
Limit Sensor	Equipped (NORMAL CLOSE)
Origin Sensor	Equipped (NORMAL OPEN)
Proximity Origin Sensor	None
Motor Type	5-Phase Stepper, (0.5A/Ph, 0.72 deg. step angle)

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