65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, Center Micrometer, +/-6.5/6.5/5.0mm, M6 Threads

TSDS-655C-M6

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XYZ axis Stainless Steel Linear Stages suitable for hard vacuum and clean room applications.
Same design and performance as TSD stages.
Completely made of stainless steel for excellent corrosion resistance.
Both the stage and the stainless steel micrometer head are lubricated with a high grade vacuum grease (YVAC2).



More Information
Name 65X65mm EXC Bearing, Vacuum Compatible, Stainless Steel, XYZ-Axis Stage, Center Micrometer, +/-6.5/6.5/5.0mm, M6 Threads
Weight 2.2000kgs
Guide
  • The TSDS series stages are suitable for use in clean rooms or vacuum applications.Vacuum measurement data
  • Also ideal for use in airtight spaces that have to avoid outgassing.
Attention
  • This translation stage type is not suitable for inverted use. In this condition, all load would be pulling against the spring.
  • These stages use a pivot mechanism to transfer horizontal motion to vertical motion. This mechanism induces a small non-linearity between the distance the micrometer moves and the distance the stage platform moves. Contact our Sales Division for more information.
  • Regarding 25 × 25mm and 40 × 40mm size stages, please do not apply heavy load toward the rotating (‘yawing’) direction, as it may damage the stage.
Image Label Stainless Steel Vacuum XYZ Stage 65x65mm M6 Threads Center Drive Horizontal Platform
Stage Size 65×65mm
Travel XY axis±6.5mm Z axis±5mm
Load Capacity 147N (15.0kg)
Mounting Thread M6
Micrometer Position Center
Lead of Actuator 0.5mm
Micrometer Readable Resolution 0.01mm
Travel Accuracy / Straightness 2.5μm
Max. Moment Capacity / Pitch 6.9N・m
Max. Moment Capacity / Roll 6.9N・m
Moment Stiffness / Pitch 1.0″/N・cm
Moment Stiffness / Roll 1.0″/N・cm
Parallelism 130μm
In stock
SKU
TSDS-655C-M6
€1,654.20

Delivery in : 6-12 weeks

XYZ axis Stainless Steel Linear Stages suitable for hard vacuum and clean room applications.
Same design and performance as TSD stages.
Completely made of stainless steel for excellent corrosion resistance.
Both the stage and the stainless steel micrometer head are lubricated with a high grade vacuum grease (YVAC2).