10nm Feedback Stage - 230x180mm

NFS180-200PX

CE
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution. The 10 nm Feedback Stage is available in 8 different table sizes.
  • Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected.
  • A plugin for the "Autoconfig" function is equipped for user convenience.
  • Controllers compatible with the Feedback Stage (NFS series) are available.
More Information
Name 10nm Feedback Stage - 230x180mm
Weight 13.2000kgs
Guide
  • Use a controller (SHRC-203) compatible with Feedback Stage (NFS series).
Attention
  • When operating, use in an environment with minimal temperature fluctuation. (Recommended: 23±1℃)
  • Use the product in an environment with as little vibration as possible. Or use it in an anti-vibration environment.
  • Use in an environment free of oil mist. Otherwise, the glass scale may become contaminated and scale errors may occur.
  • Contact our Sales if you intend to mount a workpiece larger than the size of the table surface.
Travel 200mm
Load Capacity 196N (20.0kg)
Positioning Accuracy 2μm
Positional Repeatability 0.6μm
Out of stock
SKU
NFS180-200PX
€7,590.00
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution. The 10 nm Feedback Stage is available in 8 different table sizes.

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