Active Vibration Isolation Systems
Active vibration isolation systems consist of a spring, feedback, and feed-forward control algorithm with vibration sensors and actuators. e feedback control algorithm uses sensors that continuously measure disturbance originating from a payload, and sends signals to the actuators to cancel out that disturbance. At the same time, the feed-forward control system uses measurements of external vibration for controller input, remarkably reducing floor vibration. Active Vibration Isolation in Low Frequency. Applications : Atomic Force Microscopy, Fluorescence Microscopy, Scanning Probe Microscopy, 3D Optical Microscopy, Optical Microscopy with Nanometer Resolution, Digital Holographic Microscopy, Stylus Profilometry, Interferometry, Surface Roughness Metrology.