Select Website
EUROPE
    Select website

    Your location is set on :

    EUROPE


Language
lang united-kingdom

    Language is set on :

    united-kingdom

    Change to :

  • germany
  • france
Search
Advanced Search
Cart
quotation icon My Quote

Contact us
+33-1-6918-1700

50nm Feedback Stages

NFS-X

More about
50nm Feedback Stages
Out of stock
SKU
NFS-X
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
Add to Wish List
custom product
Customize product
Filters
Enabled filters :
Remove all filters
Name
Travel
Material
Load Capacity
Stage Size
Delivery Price Add to cart
details
NFS180-200X
200mm Aluminium 196N (20.0kg)
6-12 weeks
€6,900.00
Finish Black anodized
Feed Screw Ball screw diameter φ10mm, 2mm lead
Resolution (Full) 4μm/pulse　*1
Resolution (Half) 2μm/pulse　*1
MAX Speed 20mm/sec
Positioning Accuracy 2μm *2
Positional Repeatability 0.6μm *2
Micro-range Bi-directional Repeatability ±100nm *3
Minimum Incremental Motion (reference) 150nm
Moment Stiffness / Pitch 0.02″/N･cm
Moment Stiffness / Yaw 0.02″/N･cm
Moment Stiffness / Roll 0.02″/N･cm
Lost Motion 0.6μm
Backlash 1μm
Parallelism 100μm
Running Parallelism 20μm
Pitch 20″
Yaw 20″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK545NBW (□42mm)
Scale Resolution 50nm
details
NFS120-50X
50mm Aluminium 98N (10.0kg) 120×120mm
7-10 weeks
€3,942.90
Finish Black anodized
Feed Screw Ball screw diameter φ8mm, 1mm lead
Resolution (Full) 2μm/pulse　*1
Resolution (Half) 1μm/pulse　*1
MAX Speed 10mm/sec
Positioning Accuracy 1μm *2
Positional Repeatability 0.5μm *2
Micro-range Bi-directional Repeatability ±100nm *3
Minimum Incremental Motion (reference) 150nm
Moment Stiffness / Pitch 0.05″/N･cm
Moment Stiffness / Yaw 0.05″/N･cm
Moment Stiffness / Roll 0.05″/N･cm
Lost Motion 0.5μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK545NBW (□42mm)
Scale Resolution 50nm
details
NFS60-40X
40mm Aluminium 49N (5.0kg)
7-10 weeks
€3,745.70
Finish Black anodized
Feed Screw Ball screw diameter φ4mm, 1mm lead
Positioning Slide Crossed roller
Resolution (Full) 2μm/pulse　*1
Resolution (Half) 1μm/pulse　*1
MAX Speed 10mm/sec
Positioning Accuracy 1μm *2
Positional Repeatability 0.5μm *2
Micro-range Bi-directional Repeatability ±100nm *3
Minimal Incremental Motion 150nm
Moment Stiffness / Pitch 0.5″/N･cm
Moment Stiffness / Yaw 0.5″/N･cm
Moment Stiffness / Roll 0.5″/N･cm
Lost Motion 0.5μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK523PMB-C5（□28mm）
Scale Resolution 50nm
details
NFS180-300X
300mm Aluminium 196N (20.0kg)
7-10 weeks
€7,392.90
Finish Black anodized
Feed Screw Ball screw diameter φ10mm, 2mm lead
Resolution (Full) 4μm/pulse　*1
Resolution (Half) 2μm/pulse　*1
MAX Speed 20mm/sec
Positioning Accuracy 2μm *2
Positional Repeatability 0.6μm *2
Micro-range Bi-directional Repeatability ±100nm *3
Minimum Incremental Motion (reference) 150nm
Moment Stiffness / Pitch 0.02″/N･cm
Moment Stiffness / Yaw 0.02″/N･cm
Moment Stiffness / Roll 0.02″/N･cm
Lost Motion 0.6μm
Backlash 1μm
Parallelism 100μm
Running Parallelism 20μm
Pitch 20″
Yaw 20″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK545NBW (□42mm)
Scale Resolution 50nm
details
NFS100-100X
100mm Aluminium 98N (10.0kg)
7-10 weeks
€4,780.70
Finish Black anodized
Feed Screw Ball screw diameter φ8mm, 1mm lead
Positioning Slide Crossed roller
Resolution (Full) 2μm/pulse　*1
Resolution (Half) 1μm/pulse　*1
MAX Speed 10mm/sec
Positioning Accuracy 2μm *2
Positional Repeatability 0.5μm *2
Micro-range Bi-directional Repeatability ±100nm *3
Minimal Incremental Motion 150nm
Moment Stiffness / Pitch 0.05″/N･cm
Moment Stiffness / Yaw 0.05″/N･cm
Moment Stiffness / Roll 0.05″/N･cm
Lost Motion 0.5μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK545NBW (□42mm)
Scale Resolution 50nm
details
NFS60-20X
20mm Aluminium 49N (5.0kg)
7-10 weeks
€3,154.30
Finish Black anodized
Feed Screw Ball screw diameter φ4mm, 1mm lead
Positioning Slide Crossed roller
Resolution (Full) 2μm/pulse　*1
Resolution (Half) 1μm/pulse　*1
MAX Speed 10mm/sec
Positioning Accuracy 1μm *2
Positional Repeatability 0.5μm *2
Micro-range Bi-directional Repeatability ±100nm *3
Minimum Incremental Motion (reference) 150nm
Moment Stiffness / Pitch 0.5″/N･cm
Moment Stiffness / Yaw 0.5″/N･cm
Moment Stiffness / Roll 0.5″/N･cm
Lost Motion 0.5μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK523PMB-C5（□28mm）
Scale Resolution 50nm
details
NFS120-100X
100mm Aluminium 98N (10.0kg)
7-10 weeks
€4,780.70
Finish Black anodized
Feed Screw Ball screw diameter φ8mm, 1mm lead
Positioning Slide Crossed roller
Resolution (Full) 2μm/pulse　*1
Resolution (Half) 1μm/pulse　*1
MAX Speed 10mm/sec
Positioning Accuracy 2μm *2
Positional Repeatability 0.5μm *2
Micro-range Bi-directional Repeatability ±100nm *3
Minimum Incremental Motion (reference) 150nm
Moment Stiffness / Pitch 0.05″/N･cm
Moment Stiffness / Yaw 0.05″/N･cm
Moment Stiffness / Roll 0.05″/N･cm
Lost Motion 0.5μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK545NBW (□42mm)
Scale Resolution 50nm
details
NFS100-50X
50mm Aluminium 98N (10.0kg) 100×100mm
7-10 weeks
€3,942.90
Finish Black anodized
Feed Screw Ball screw diameter φ8mm, 1mm lead
Positioning Slide Crossed roller
Resolution (Full) 2μm/pulse　*1
Resolution (Half) 1μm/pulse　*1
MAX Speed 10mm/sec
Positioning Accuracy 1μm *2
Positional Repeatability 0.5μm *2
Micro-range Bi-directional Repeatability ±100nm *3
Minimal Incremental Motion 150nm
Moment Stiffness / Pitch 0.05″/N･cm
Moment Stiffness / Yaw 0.05″/N･cm
Moment Stiffness / Roll 0.05″/N･cm
Lost Motion 0.5μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK545NBW (□42mm)
Scale Resolution 50nm

You must be logged in to ask questions

Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected. A plugin for the "Autoconfig" function is equipped for user convenience. Controllers compatible with the Feedback Stage (NFS series) are available. The 50 nm Feedback Stage is available in 6 different table sizes.