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1nm Feedback Stage - 100x100mm

NFS100-50UPX

CE
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High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
The 1 nm Feedback Stage is available in 6 different table sizes.
  • Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected.
  • A plugin for the "Autoconfig" function is equipped for user convenience.
  • Controllers compatible with the Feedback Stage (NFS series) are available.
More Information
Name 1nm Feedback Stage - 100x100mm
Weight 2.7000kgs
Guide
  • Use a controller (SHRC-203) compatible with Feedback Stage (NFS series).
Remark *1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected.
*2 Values when the multi-point error compensation function is enabled.
*3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a micro range. Measurement step for 1 nm feedback stage (NFS-UPX series): 5 nm
Attention
    *
  • When operating, use in an environment with minimal temperature fluctuation. (Recommended: 23±1℃)
  • Use the product in an environment with as little vibration as possible. Or use it in an anti-vibration environment.
  • Use in an environment free of oil mist. Otherwise, the glass scale may become contaminated and scale errors may occur.
  • Contact our Sales if you intend to mount a workpiece larger than the size of the table surface.
Stage Size 100×100mm
Travel 50mm
Material Aluminium
Load Capacity 98N (10.0kg)
Stage Size 100x100mm
Finish Black anodized
Feed Screw Ball screw diameter φ4mm, 1mm lead
Positioning Slide Crossed roller
Resolution (Full) 2μm/pulse　*1
Resolution (Half) 1μm/pulse　*1
Positioning Accuracy 1μm *2
Positional Repeatability 0.4μm *2
Micro-range Bi-directional Repeatability ±3nm *3
Minimal Incremental Motion 3nm
MAX Speed 5mm/sec
Moment Stiffness / Pitch 0.05″/N･cm
Moment Stiffness / Yaw 0.05″/N･cm
Moment Stiffness / Roll 0.05″/N･cm
Lost Motion 0.4μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK523PMB-C5（□28mm）
Scale Resolution 1nm
In stock
SKU
NFS100-50UPX
€7,885.70

Delivery in : 1 week

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High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
The 1 nm Feedback Stage is available in 6 different table sizes.

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