10nm Feedback Stage - 175x100mm
NFS100-100PX
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
The 10 nm Feedback Stage is available in 8 different table sizes.
- Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected.
- A plugin for the "Autoconfig" function is equipped for user convenience.
- Controllers compatible with the Feedback Stage (NFS series) are available.
| Name | 10nm Feedback Stage - 175x100mm |
|---|---|
| Weight | 3.7000kgs |
| Guide |
|
| Attention |
|
| Travel | 100mm |
| Load Capacity | 98N (10.0kg) |
| Finish | Black anodized |
| Feed Screw | Ball screw diameter φ4mm, 1mm lead |
| Positioning Slide | Crossed roller |
| Positioning Accuracy | 1μm |
| Positional Repeatability | 0.4μm |
| Minimal Incremental Motion | 3nm |
| MAX Speed | 5mm/sec |
| Moment Stiffness / Pitch | 0.05″/N･cm |
| Moment Stiffness / Yaw | 0.05″/N･cm |
| Moment Stiffness / Roll | 0.05″/N･cm |
| Lost Motion | 0.4μm |
| Backlash | 1μm |
| Parallelism | 50μm |
| Running Parallelism | 10μm |
| Pitch | 15″ |
| Yaw | 15″ |
| Motor / Motor Type | 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.） |
| Motor / Motor Part Number | PK523PMB-C5（□28mm） |
| Scale Resolution | 1nm |
In stock
SKU
NFS100-100PX
€5,421.40
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High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
The 10 nm Feedback Stage is available in 8 different table sizes.