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10nm Feedback Stages

NFS-PX

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10nm Feedback Stages
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SKU
NFS-PX
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
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Stage Size
Travel
Material
Load Capacity
Delivery Price Add to cart
details
NFS100-50PX
100×100mm 50mm Aluminium 98N (10.0kg)
1 week
₹390,341.60
Contact us
Finish Black anodized
Feed Screw Ball screw diameter φ4mm, 1mm lead
Positioning Slide Crossed roller
Resolution (Full) 2μm/pulse　*1
Resolution (Half) 1μm/pulse　*1
MAX Speed 10mm/sec
Positioning Accuracy 1μm *2
Positional Repeatability 0.5μm *2
Micro-range Bi-directional Repeatability ±20nm *3
Minimal Incremental Motion 30nm
Moment Stiffness / Pitch 0.05″/N･cm
Moment Stiffness / Yaw 0.05″/N･cm
Moment Stiffness / Roll 0.05″/N･cm
Lost Motion 0.5μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK545NBW (□42mm)
Scale Resolution 10nm
details
NFS120-100PX
100mm Aluminium 98N (10.0kg)
1 week
₹477,083.20
Contact us
Finish Black anodized
Feed Screw Ball screw diameter φ8mm, 1mm lead
Positioning Slide Crossed roller
Resolution (Full) 2μm/pulse　*1
Resolution (Half) 1μm/pulse　*1
MAX Speed 10mm/sec
Positioning Accuracy 2μm *2
Positional Repeatability 0.5μm *2
Micro-range Bi-directional Repeatability ±20nm *3
Minimum Incremental Motion (reference) 30nm
Moment Stiffness / Pitch 0.05″/N･cm
Moment Stiffness / Yaw 0.05″/N･cm
Moment Stiffness / Roll 0.05″/N･cm
Lost Motion 0.5μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK545NBW (□42mm)
Scale Resolution 10nm
details
NFS60-20PX
20mm Aluminium 49N (5.0kg)
1 week
₹317,400.00
Contact us
Finish Black anodized
Feed Screw Ball screw diameter φ4mm, 1mm lead
Positioning Slide Crossed roller
Resolution (Full) 2μm/pulse　*1
Resolution (Half) 1μm/pulse　*1
MAX Speed 10mm/sec
Positioning Accuracy 1μm *2
Positional Repeatability 0.5μm *2
Micro-range Bi-directional Repeatability ±20nm *3
Minimum Incremental Motion (reference) 30nm
Moment Stiffness / Pitch 0.5″/N･cm
Moment Stiffness / Yaw 0.5″/N･cm
Moment Stiffness / Roll 0.5″/N･cm
Lost Motion 0.5μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK523PMB-C5（□28mm）
Scale Resolution 10nm
details
NFS100-100PX
100mm Aluminium 98N (10.0kg)
1 week
₹477,083.20
Contact us
Finish Black anodized
Feed Screw Ball screw diameter φ8mm, 1mm lead
Positioning Slide Crossed roller
Resolution (Full) 2μm/pulse　*1
Resolution (Half) 1μm/pulse　*1
MAX Speed 10mm/sec
Positioning Accuracy 2μm *2
Positional Repeatability 0.5μm *2
Micro-range Bi-directional Repeatability ±20nm *3
Minimum Incremental Motion (reference) 30nm
Moment Stiffness / Pitch 0.05″/N･cm
Moment Stiffness / Yaw 0.05″/N･cm
Moment Stiffness / Roll 0.05″/N･cm
Lost Motion 0.5μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK545NBW (□42mm)
Scale Resolution 10nm
details
NFS180-200PX
200mm Aluminium 196N (20.0kg)
6-12 weeks
₹667,920.00
Contact us
Finish Black anodized
Feed Screw Ball screw diameter φ10mm, 2mm lead
Positioning Slide LM Guide
Resolution (Full) 4μm/pulse　*1
Resolution (Half) 2μm/pulse　*1
MAX Speed 20mm/sec
Positioning Accuracy 2μm *2
Positional Repeatability 0.6μm *2
Micro-range Bi-directional Repeatability ±20nm *3
Minimum Incremental Motion (reference) 30nm
Moment Stiffness / Pitch 0.02″/N･cm
Moment Stiffness / Yaw 0.02″/N･cm
Moment Stiffness / Roll 0.02″/N･cm
Lost Motion 0.6μm
Backlash 1μm
Parallelism 100μm
Running Parallelism 20μm
Pitch 20″
Yaw 20″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK545NBW (□42mm)
Scale Resolution 10nm
details
NFS60-40PX
Aluminium 49N (5.0kg)
1 week
₹372,996.80
Contact us
Travel 40mm
Finish Black anodized
Feed Screw Ball screw diameter φ4mm, 1mm lead
Positioning Slide Crossed roller
Resolution (Full) 2μm/pulse　*1
Resolution (Half) 1μm/pulse　*1
MAX Speed 10mm/sec
Positioning Accuracy 1μm *2
Positional Repeatability 0.5μm *2
Micro-range Bi-directional Repeatability ±20nm *3
Minimal Incremental Motion 30nm
Moment Stiffness / Pitch 0.5″/N･cm
Moment Stiffness / Yaw 0.5″/N･cm
Moment Stiffness / Roll 0.5″/N･cm
Lost Motion 0.5μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK523PMB-C5（□28mm）
Scale Resolution 10nm
details
NFS120-50PX
120×120mm 50mm Aluminium 98N (10.0kg)
1 week
₹390,341.60
Contact us
Finish Black anodized
Feed Screw Ball screw diameter φ8mm, 1mm lead
Positioning Slide Crossed roller
Resolution (Full) 2μm/pulse　*1
Resolution (Half) 1μm/pulse　*1
MAX Speed 10mm/sec
Positioning Accuracy 1μm *2
Positional Repeatability 0.5μm *2
Micro-range Bi-directional Repeatability ±20nm *3
Minimal Incremental Motion 30nm
Moment Stiffness / Pitch 0.05″/N･cm
Moment Stiffness / Yaw 0.05″/N･cm
Moment Stiffness / Roll 0.05″/N･cm
Lost Motion 0.5μm
Backlash 1μm
Parallelism 50μm
Running Parallelism 10μm
Pitch 15″
Yaw 15″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK545NBW (□42mm)
Scale Resolution 10nm
details
NFS180-300PX
300mm Aluminium 196N (20.0kg)
6-12 weeks
₹711,295.20
Contact us
Finish Black anodized
Feed Screw Ball screw diameter φ10mm, 2mm lead
Positioning Slide LM Guide
Resolution (Full) 4μm/pulse　*1
Resolution (Half) 2μm/pulse　*1
MAX Speed 20mm/sec
Positioning Accuracy 2μm *2
Positional Repeatability 0.6μm *2
Micro-range Bi-directional Repeatability ±20nm *3
Minimum Incremental Motion (reference) 30nm
Moment Stiffness / Pitch 0.02″/N･cm
Moment Stiffness / Yaw 0.02″/N･cm
Moment Stiffness / Roll 0.02″/N･cm
Lost Motion 0.6μm
Backlash 1μm
Parallelism 100μm
Running Parallelism 20μm
Pitch 20″
Yaw 20″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK545NBW (□42mm)
Scale Resolution 10nm

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Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected. A plugin for the "Autoconfig" function is equipped for user convenience. Controllers compatible with the Feedback Stage (NFS series) are available. The 10 nm Feedback Stage is available in 6 different table sizes.