Piezo Flexure Single Axis Stage 60mm Size

SFS-H60X(CL)

3d-simple-product
Nanometer resolution high stiffness flexure stages.



More Information
Name Piezo Flexure Single Axis Stage 60mm Size
Weight 0.4000kgs
Guide -
Attention
  • The travel at closed loop control is reduced to around 20% less than at open loop control.
Image Label Piezo Flexure Single Axis Stage 60mm Size
Travel (at open-loop control) 100μm±15%
Load Capacity 19.6N (2.0kg)
Travel (at open-loop control) 100μm±15%
Stage Size 60×60mm
Actuator Piezo actuator
Theoretical Resolution (open-loop 1nm
Resolution (closed-loop) 10nm
Linearity <0.3%
Perpendicularity (Horizontal Direction) 1μm
Positional Repeatability <0.1μm
Load Capacity 19.6N(2.0kgf)
Micro-displacement Sensor Digital Sensor
Compatible Cable FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
In stock
SKU
SFS-H60X(CL)
£2,390.40

Delivery in : in stock

Nanometer resolution high stiffness flexure stages.

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