50nm-Resolution Stage System

FS-X

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FS-X

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50mm Travel X-axis Motor Stage, 50nm resolution, 120X120mm, M4 Thd
FS-1050X

120×120mm

1-3 weeks

Travel	50mm
Stage Size	120×120mm
Positioning Slide	Crossed roller
Feed Screw	Ball screw diameter φ6mm, 1mm lead
Driving Motor	□28mm 5 phase stepping motor
Weight	1.6㎏
Minimum Resolution *1 FC-411	50nm
Minimum Resolution *1 FC-414	-
Positional Repeatability *1 FC-411	±100nm
Positional Repeatability *1 FC-414	-
Load Capacity	98N(10kgf)
Maximum Travel Speed	10μm
*1 Minimum resolution and position repeatability accuracy for built-in scale read.
Primary Material	Aluminum
Finish	Black anodized
Motor Type	Equipped
Limit Sensor	None
Origin Sensor	None
Proximity Origin Sensor	None
Signal Cycle	4μm
Scale Cable*	2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.
Compatible Controller	FC-411: FS-1020X, FS-1050X, FS-1100X, FS-3150X FC-414: FS-3200X, FS-3300X, FS-3400X
Compatible Cable	PM-CA: FS-1020X, FS-1050X, FS-1100X, FS-3150X PM4N-CA*SD: FS-3200X, FS-3300X, FS-3400X

200mm Travel X-axis Motor Stage, 50nm resolution, 160X230mm, M4 Thd
FS-3200X

160×230mm

1-3 weeks

Travel	200mm
Stage Size	160×230mm
Positioning Slide	LM Guide
Feed Screw	Ball screw diameter φ10mm, 2mm lead
Driving Motor	□28mm 5 phase stepping motor
Weight	5㎏
Minimum Resolution *1 FC-411	-
Minimum Resolution *1 FC-414	50nm
Positional Repeatability *1 FC-411	-
Positional Repeatability *1 FC-414	±100nm
Load Capacity	196N(20kgf)
Maximum Travel Speed	10μm
*1 Minimum resolution and position repeatability accuracy for built-in scale read.
Primary Material	Aluminum
Finish	Black anodized
Motor Type	Equipped
Limit Sensor	None
Origin Sensor	None
Proximity Origin Sensor	None
Signal Cycle	4μm
Scale Cable*	2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.
Compatible Controller	FC-411: FS-1020X, FS-1050X, FS-1100X, FS-3150X FC-414: FS-3200X, FS-3300X, FS-3400X
Compatible Cable	PM-CA: FS-1020X, FS-1050X, FS-1100X, FS-3150X PM4N-CA*SD: FS-3200X, FS-3300X, FS-3400X

100mm Travel X-axis Motor Stage, 50nm resolution, 120X120mm, M4 Thd
FS-1100X

120×120mm

1-3 weeks

Travel	100mm
Stage Size	120×120mm
Positioning Slide	LM Guide
Feed Screw	Ball screw diameter φ6mm, 1mm lead
Driving Motor	□28mm 5 phase stepping motor
Weight	2.1㎏
Minimum Resolution *1 FC-411	50nm
Minimum Resolution *1 FC-414	-
Positional Repeatability *1 FC-411	±100nm
Positional Repeatability *1 FC-414	-
Load Capacity	98N(10kgf)
Maximum Travel Speed	10μm
*1 Minimum resolution and position repeatability accuracy for built-in scale read.
Primary Material	Aluminum
Finish	Black anodized
Motor Type	Equipped
Limit Sensor	None
Origin Sensor	None
Proximity Origin Sensor	None
Signal Cycle	4μm
Scale Cable*	2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.
Compatible Controller	FC-411: FS-1020X, FS-1050X, FS-1100X, FS-3150X FC-414: FS-3200X, FS-3300X, FS-3400X
Compatible Cable	PM-CA: FS-1020X, FS-1050X, FS-1100X, FS-3150X PM4N-CA*SD: FS-3200X, FS-3300X, FS-3400X

300mm Travel X-axis Motor Stage, 50nm resolution, 160X160mm, M4 Thd
FS-3300X

160×160mm

1-3 weeks

Travel	300mm
Stage Size	160×160mm
Positioning Slide	LM Guide
Feed Screw	Ball screw diameter φ14mm, 5mm lead
Driving Motor	□42mm 5 phase stepping motor
Weight	8.5㎏
Minimum Resolution *1 FC-411	-
Minimum Resolution *1 FC-414	50nm
Positional Repeatability *1 FC-411	-
Positional Repeatability *1 FC-414	±100nm
Load Capacity	196N(20kgf)
Maximum Travel Speed	10μm
*1 Minimum resolution and position repeatability accuracy for built-in scale read.
Primary Material	Aluminum
Finish	Black anodized
Motor Type	Equipped
Limit Sensor	None
Origin Sensor	None
Proximity Origin Sensor	None
Signal Cycle	4μm
Scale Cable*	2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.
Compatible Controller	FC-411: FS-1020X, FS-1050X, FS-1100X, FS-3150X FC-414: FS-3200X, FS-3300X, FS-3400X
Compatible Cable	PM-CA: FS-1020X, FS-1050X, FS-1100X, FS-3150X PM4N-CA*SD: FS-3200X, FS-3300X, FS-3400X

20mm Travel X-axis Motor Stage, 50nm resolution, 60X60mm, M4 Thd
FS-1020X

60×60mm

1-3 weeks

Travel	20mm
Stage Size	60×60mm
Positioning Slide	Crossed roller
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Driving Motor	□28mm 5 phase stepping motor
Weight	0.5㎏
Minimum Resolution *1 FC-411	50nm
Minimum Resolution *1 FC-414	-
Positional Repeatability *1 FC-411	±100nm
Positional Repeatability *1 FC-414	-
Load Capacity	49N(5kgf)
Maximum Travel Speed	10μm
*1 Minimum resolution and position repeatability accuracy for built-in scale read.
Primary Material	Aluminum
Finish	Black anodized
Motor Type	Equipped
Limit Sensor	None
Origin Sensor	None
Proximity Origin Sensor	None
Signal Cycle	4μm
Scale Cable*	2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.
Compatible Controller	FC-411: FS-1020X, FS-1050X, FS-1100X, FS-3150X FC-414: FS-3200X, FS-3300X, FS-3400X
Compatible Cable	PM-CA: FS-1020X, FS-1050X, FS-1100X, FS-3150X PM4N-CA*SD: FS-3200X, FS-3300X, FS-3400X

150mm Travel X-axis Motor Stage, 50nm resolution, 120X170mm, M4 Thd
FS-3150X

120×170mm

1-3 weeks

Travel	150mm
Stage Size	120×170mm
Positioning Slide	LM Guide
Feed Screw	Ball screw diameter φ8mm, 1mm lead
Driving Motor	□28mm 5 phase stepping motor
Weight	2.8㎏
Minimum Resolution *1 FC-411	50nm
Minimum Resolution *1 FC-414	-
Positional Repeatability *1 FC-411	±100nm
Positional Repeatability *1 FC-414	-
Load Capacity	98N(10kgf)
Maximum Travel Speed	10μm
*1 Minimum resolution and position repeatability accuracy for built-in scale read.
Primary Material	Aluminum
Finish	Black anodized
Motor Type	Equipped
Limit Sensor	None
Origin Sensor	None
Proximity Origin Sensor	None
Signal Cycle	4μm
Scale Cable*	2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.
Compatible Controller	FC-411: FS-1020X, FS-1050X, FS-1100X, FS-3150X FC-414: FS-3200X, FS-3300X, FS-3400X
Compatible Cable	PM-CA: FS-1020X, FS-1050X, FS-1100X, FS-3150X PM4N-CA*SD: FS-3200X, FS-3300X, FS-3400X

400mm Travel X-axis Motor Stage, 50nm resolution, 160X160mm, M4 Thd
FS-3400X

160×160mm

1-3 weeks

Travel	400mm
Stage Size	160×160mm
Positioning Slide	LM Guide
Feed Screw	Ball screw diameter φ14mm, 5mm lead
Driving Motor	□42mm 5 phase stepping motor
Weight	9.5㎏
Minimum Resolution *1 FC-411	-
Minimum Resolution *1 FC-414	50nm
Positional Repeatability *1 FC-411	-
Positional Repeatability *1 FC-414	±100nm
Load Capacity	196N(20kgf)
Maximum Travel Speed	10μm
*1 Minimum resolution and position repeatability accuracy for built-in scale read.
Primary Material	Aluminum
Finish	Black anodized
Motor Type	Equipped
Limit Sensor	None
Origin Sensor	None
Proximity Origin Sensor	None
Signal Cycle	4μm
Scale Cable*	2m *Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.
Compatible Controller	FC-411: FS-1020X, FS-1050X, FS-1100X, FS-3150X FC-414: FS-3200X, FS-3300X, FS-3400X
Compatible Cable	PM-CA: FS-1020X, FS-1050X, FS-1100X, FS-3150X PM4N-CA*SD: FS-3200X, FS-3300X, FS-3400X

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