10nm Feedback Stages

NFS-PX

10nm Feedback Stages
En stock
SKU
NFS-PX
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
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10nm Feedback Stage - 75x60mm
NFS60-20PX
20mm 49N (5.0kg)
3-5 days
3 450,00 €
Positioning Accuracy 1μm
Positional Repeatability 0.5μm
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10nm Feedback Stage - 175x100mm
NFS100-100PX
100mm 98N (10.0kg)
6-12 weeks
5 421,40 €
Positioning Accuracy 2μm
Positional Repeatability 0.5μm
i
10nm Feedback Stage - 230x180mm
NFS180-200PX
200mm 196N (20.0kg)
6-12 weeks
7 590,00 €
Positioning Accuracy 2μm
Positional Repeatability 0.6μm
i
10nm Feedback Stage - 110x60mm
NFS60-40PX
±40mm 49N (5.0kg)
3-5 days
4 238,60 €
Positioning Accuracy 1μm
Positional Repeatability 0.5μm
i
10nm Feedback Stage - 120x120mm
NFS120-50PX
50mm 98N (10.0kg) 120×120mm
3-5 days
4 435,70 €
Positioning Accuracy 1μm
Positional Repeatability 0.5μm
i
10nm Feedback Stage - 330x180mm
NFS180-300PX
300mm 196N (20.0kg)
6-12 weeks
8 082,90 €
Positioning Accuracy 2μm
Positional Repeatability 0.6μm
i
10nm Feedback Stage - 100x100mm
NFS100-50PX
50mm 98N (10.0kg) 100×100mm
6-12 weeks
4 435,70 €
Positioning Accuracy 1μm
Positional Repeatability 0.5μm
i
10nm Feedback Stage - 175x120mm
NFS120-100PX
100mm 98N (10.0kg)
6-12 weeks
5 421,40 €
Positioning Accuracy 2μm
Positional Repeatability 0.5μm

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Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected. A plugin for the "Autoconfig" function is equipped for user convenience. Controllers compatible with the Feedback Stage (NFS series) are available. The 10 nm Feedback Stage is available in 6 different table sizes.

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