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SFS-H
Nanometer resolution high stiffness flexure stages.
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Achtung ▶The travel at closed loop control is reduced to around 20% less than at open loop control.
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Piezo-Flexure-Tisch mit vertikaler Achse, Größe 40 mm
SFS-H40Z(CL) |
100μm±15% | 6.7N (0.7kg) |
6-12 weeks
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2.464,30 €
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Piezo-Flexure-Tisch mit zwei Achsen, Größe 60 mm
SFS-H60XY(CL) |
100μm±15% | 14.7N (1.5kg) |
6-12 weeks
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4.830,00 €
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Piezo-Flexure-Einzelachsentisch, Größe 60 mm
SFS-H60X(CL) |
100μm±15% | 19.6N (2.0kg) |
in stock
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2.464,30 €
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Piezo Flexure Drei-Achsen-Tisch, 60 mm Größe
SFS-H60XYZ(CL) |
100μm±15% | 9.8N (1.0kg) |
6-12 weeks
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5.520,00 €
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Einachsiger Piezo-Flexure-Tisch, 40 mm Größe
SFS-H40X(CL) |
90μm±15% | 9.8N (1.0kg) |
6-12 weeks
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2.464,30 €
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Piezo-Flexure-Tisch mit vertikaler Achse, Größe 60 mm
SFS-H60Z(CL) |
100μm±15% | 9.8N (1.0kg) |
6-12 weeks
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2.314,30 €
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◦These compact piezo stages offer high precision and high resolution positioning by utilizing full closed loop control with digital frequency based sensors.
◦Using piezo element actuators, open loop travel between 90μm − 100μm is available, with minimum incremental motion as small as 1nm. Compared to the open-loop control, the maximum travel of closed-loop control will be less about 10%.
◦Closed loop travel is 80% of the open loop maximum and closed loop resolution is 10nm.
◦Recommended controllers are the FINE series controllers. Both digital and analog inputs are available.
◦Using piezo element actuators, open loop travel between 90μm − 100μm is available, with minimum incremental motion as small as 1nm. Compared to the open-loop control, the maximum travel of closed-loop control will be less about 10%.
◦Closed loop travel is 80% of the open loop maximum and closed loop resolution is 10nm.
◦Recommended controllers are the FINE series controllers. Both digital and analog inputs are available.
