Piezo Flexure Three Axis Stage 60mm Size
SFS-H60XYZ(CL)
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Nanometer resolution high stiffness flexure stages.
Name | Piezo Flexure Three Axis Stage 60mm Size |
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Weight | 0.6300kgs |
Guide | - |
Attention |
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Image Label | Piezo Flexure Three Axis Stage 60mm Size |
Travel (at open-loop control) | 100μm±15% |
Load Capacity | 9.8N (1.0kg) |
Travel (at open-loop control) | 100μm±15% |
Stage Size | 60×60mm |
Actuator | Piezo actuator |
Theoretical Resolution (open-loop | 1nm |
Resolution (closed-loop) | 10nm |
Linearity | <0.5% |
Perpendicularity (Horizontal Direction) | 1μm |
Positional Repeatability | <0.15μm |
Load Capacity | 9.8N(1.0kgf) |
Micro-displacement Sensor | Digital Sensor |
Compatible Cable |
FINE-CA-3: For piezo DS1-CA-3: For digital sensor |
In stock
SKU
SFS-H60XYZ(CL)
$5,826.00
Nanometer resolution high stiffness flexure stages.