1nm Feedback Stage - 110x60mm

NFS60-40UPX

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High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution. The 1 nm Feedback Stage is available in 6 different table sizes.

Details

Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected.
A plugin for the "Autoconfig" function is equipped for user convenience.
Controllers compatible with the Feedback Stage (NFS series) are available.

More Information

More Information
Name	1nm Feedback Stage - 110x60mm
Weight	1.0000kgs
Guide	Use a controller (SHRC-203) compatible with Feedback Stage (NFS series).
Attention	* When operating, use in an environment with minimal temperature fluctuation. (Recommended: 23±1℃) Use the product in an environment with as little vibration as possible. Or use it in an anti-vibration environment. Use in an environment free of oil mist. Otherwise, the glass scale may become contaminated and scale errors may occur. Contact our Sales if you intend to mount a workpiece larger than the size of the table surface.
Travel	40mm
Load Capacity	49N (5.0kg)
Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Positioning Accuracy	1μm
Positional Repeatability	0.4μm
Minimal Incremental Motion	3nm
MAX Speed	5mm/sec
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.4μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	1nm

In stock

SKU

NFS60-40UPX

£7,171.10

1nm Feedback Stage - 110x60mm

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