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10nm Feedback Stage - 230x180mm

NFS180-200PX

CE
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High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
The 10 nm Feedback Stage is available in 8 different table sizes.
  • Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected.
  • A plugin for the "Autoconfig" function is equipped for user convenience.
  • Controllers compatible with the Feedback Stage (NFS series) are available.
More Information
Name 10nm Feedback Stage - 230x180mm
Weight 13.2000kgs
Guide Use a controller (SHRC-203) compatible with Feedback Stage (NFS series).
Remark *1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected.
*2 Values when the multi-point error compensation function is enabled.
*3 Micro-range Bi-directional Repeatability is a test to measure repetitive positioning accuracy (ISO) in a micro range. Measurement step for 10 nm feedback stage (NFS-PX series): 50 nm
Attention
  • When operating, use in an environment with minimal temperature fluctuation. (Recommended: 23±1℃)
  • Use the product in an environment with as little vibration as possible. Or use it in an anti-vibration environment.
  • Use in an environment free of oil mist. Otherwise, the glass scale may become contaminated and scale errors may occur.
  • Contact our Sales if you intend to mount a workpiece larger than the size of the table surface.
Travel 200mm
Material Aluminium
Load Capacity 196N (20.0kg)
Finish Black anodized
Feed Screw Ball screw diameter φ10mm, 2mm lead
Positioning Slide LM Guide
Resolution (Full) 4μm/pulse　*1
Resolution (Half) 2μm/pulse　*1
MAX Speed 20mm/sec
Positioning Accuracy 2μm *2
Positional Repeatability 0.6μm *2
Micro-range Bi-directional Repeatability ±20nm *3
Minimum Incremental Motion (reference) 30nm
Moment Stiffness / Pitch 0.02″/N･cm
Moment Stiffness / Yaw 0.02″/N･cm
Moment Stiffness / Roll 0.02″/N･cm
Lost Motion 0.6μm
Backlash 1μm
Parallelism 100μm
Running Parallelism 20μm
Pitch 20″
Yaw 20″
Motor / Motor Type 5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number PK545NBW (□42mm)
Scale Resolution 10nm
Out of stock
SKU
NFS180-200PX
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High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
The 10 nm Feedback Stage is available in 8 different table sizes.

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