Motorized Single Axis Stage Series 26 Travel 200mm for Vacuum

VSGSP26-200(X)

CE
Motorized SGSP stages modified for use in high vacuum.
◦Linear stages have available travel between 35 − 200mm and has a similar footprint to the SGSP series.
More Information
Name Motorized Single Axis Stage Series 26 Travel 200mm for Vacuum
Weight 2.5000lbs
Guide
  • Includes 1m teflon coated cables to connect the vacuum motor and vacuum limit switches to the chamber feedthrough connector.
Attention -
Image Label Motorized Single Axis Stage Series 26 Travel 200mm for Vacuum
Travel 200mm
Load Capacity 58.8N (6.0kg)
Travel 200mm
Stage Size 80×80mm
Feed Screw Precision ground screw φ8mm、 2mm lead
Positioning Slide Outer rail structure
Stage Material Aluminium・Stainless steel
Finish None
Resolution (Half) 4μm/pulse
Resolution (Full) 2μm/pulse
Minimum Incremental Motion (refurence) 0.2μm
MAX Speed 20mm/sec
Positional Repeatability 10μm
Load Capacity 58.8N(6.0kgf)
Lost Motion 10μm
Sensor Part Number GN-PT5M3B-1 (Metrol Co., Ltd.)
Limit Sensor Vacuum touch sensor (NORMAL CLOSE)
Origin Sensor None
Proximity Origin Sensor None
In stock
SKU
VSGSP26-200(X)
$9,756.10

Delivery in : in stock

Motorized SGSP stages modified for use in high vacuum.

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