10nm Feedback Stages

NFS-PX

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NFS-PX

High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.

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details

NFS60-20PX

20mm

Aluminium

49N (5.0kg)

7-10 weeks

3 450,00 €

Stage Size	75x60mm
Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Resolution (Full)	2μm/pulse　*1
Resolution (Half)	1μm/pulse　*1
MAX Speed	10mm/sec
Positioning Accuracy	1μm *2
Positional Repeatability	0.5μm *2
Micro-range Bi-directional Repeatability	±20nm *3
Minimum Incremental Motion (reference)	30nm
Moment Stiffness / Pitch	0.5″/N･cm
Moment Stiffness / Yaw	0.5″/N･cm
Moment Stiffness / Roll	0.5″/N･cm
Lost Motion	0.5μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	10nm

details

NFS100-100PX

100mm

Aluminium

98N (10.0kg)

1 week

5 421,40 €

Stage Size	175x100mm
Finish	Black anodized
Feed Screw	Ball screw diameter φ8mm, 1mm lead
Positioning Slide	Crossed roller
Resolution (Full)	2μm/pulse　*1
Resolution (Half)	1μm/pulse　*1
MAX Speed	10mm/sec
Positioning Accuracy	2μm *2
Positional Repeatability	0.5μm *2
Micro-range Bi-directional Repeatability	±20nm *3
Minimum Incremental Motion (reference)	30nm
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.5μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK545NBW (□42mm)
Scale Resolution	10nm

details

NFS180-200PX

200mm

Aluminium

196N (20.0kg)

7-10 weeks

7 590,00 €

Stage Size	230x180mm
Finish	Black anodized
Feed Screw	Ball screw diameter φ10mm, 2mm lead
Positioning Slide	LM Guide
Resolution (Full)	4μm/pulse　*1
Resolution (Half)	2μm/pulse　*1
MAX Speed	20mm/sec
Positioning Accuracy	2μm *2
Positional Repeatability	0.6μm *2
Micro-range Bi-directional Repeatability	±20nm *3
Minimum Incremental Motion (reference)	30nm
Moment Stiffness / Pitch	0.02″/N･cm
Moment Stiffness / Yaw	0.02″/N･cm
Moment Stiffness / Roll	0.02″/N･cm
Lost Motion	0.6μm
Backlash	1μm
Parallelism	100μm
Running Parallelism	20μm
Pitch	20″
Yaw	20″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK545NBW (□42mm)
Scale Resolution	10nm

details

NFS60-40PX

40mm

Aluminium

49N (5.0kg)

1 week

4 238,60 €

Stage Size	110x60mm
Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Resolution (Full)	2μm/pulse　*1
Resolution (Half)	1μm/pulse　*1
MAX Speed	10mm/sec
Positioning Accuracy	1μm *2
Positional Repeatability	0.5μm *2
Micro-range Bi-directional Repeatability	±20nm *3
Minimal Incremental Motion	30nm
Moment Stiffness / Pitch	0.5″/N･cm
Moment Stiffness / Yaw	0.5″/N･cm
Moment Stiffness / Roll	0.5″/N･cm
Lost Motion	0.5μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK523PMB-C5（□28mm）
Scale Resolution	10nm

details

NFS120-50PX

50mm

Aluminium

98N (10.0kg)

1 week

4 435,70 €

Stage Size	120x120mm
Finish	Black anodized
Feed Screw	Ball screw diameter φ8mm, 1mm lead
Positioning Slide	Crossed roller
Resolution (Full)	2μm/pulse　*1
Resolution (Half)	1μm/pulse　*1
MAX Speed	10mm/sec
Positioning Accuracy	1μm *2
Positional Repeatability	0.5μm *2
Micro-range Bi-directional Repeatability	±20nm *3
Minimal Incremental Motion	30nm
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.5μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK545NBW (□42mm)
Scale Resolution	10nm

details

NFS180-300PX

300mm

Aluminium

196N (20.0kg)

7-10 weeks

8 082,90 €

Stage Size	330x180mm
Finish	Black anodized
Feed Screw	Ball screw diameter φ10mm, 2mm lead
Positioning Slide	LM Guide
Resolution (Full)	4μm/pulse　*1
Resolution (Half)	2μm/pulse　*1
MAX Speed	20mm/sec
Positioning Accuracy	2μm *2
Positional Repeatability	0.6μm *2
Micro-range Bi-directional Repeatability	±20nm *3
Minimum Incremental Motion (reference)	30nm
Moment Stiffness / Pitch	0.02″/N･cm
Moment Stiffness / Yaw	0.02″/N･cm
Moment Stiffness / Roll	0.02″/N･cm
Lost Motion	0.6μm
Backlash	1μm
Parallelism	100μm
Running Parallelism	20μm
Pitch	20″
Yaw	20″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK545NBW (□42mm)
Scale Resolution	10nm

details

NFS100-50PX

50mm

Aluminium

98N (10.0kg)

7-10 weeks

4 435,70 €

Stage Size	100x100mm
Finish	Black anodized
Feed Screw	Ball screw diameter φ4mm, 1mm lead
Positioning Slide	Crossed roller
Resolution (Full)	2μm/pulse　*1
Resolution (Half)	1μm/pulse　*1
MAX Speed	10mm/sec
Positioning Accuracy	1μm *2
Positional Repeatability	0.5μm *2
Micro-range Bi-directional Repeatability	±20nm *3
Minimal Incremental Motion	30nm
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.5μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK545NBW (□42mm)
Scale Resolution	10nm

details

NFS120-100PX

100mm

Aluminium

98N (10.0kg)

7-10 weeks

5 421,40 €

Stage Size	175x120mm
Finish	Black anodized
Feed Screw	Ball screw diameter φ8mm, 1mm lead
Positioning Slide	Crossed roller
Resolution (Full)	2μm/pulse　*1
Resolution (Half)	1μm/pulse　*1
MAX Speed	10mm/sec
Positioning Accuracy	2μm *2
Positional Repeatability	0.5μm *2
Micro-range Bi-directional Repeatability	±20nm *3
Minimum Incremental Motion (reference)	30nm
Moment Stiffness / Pitch	0.05″/N･cm
Moment Stiffness / Yaw	0.05″/N･cm
Moment Stiffness / Roll	0.05″/N･cm
Lost Motion	0.5μm
Backlash	1μm
Parallelism	50μm
Running Parallelism	10μm
Pitch	15″
Yaw	15″
Motor / Motor Type	5-phase stepping motor 0.75A/phase（Oriental Motor Co., Ltd.）
Motor / Motor Part Number	PK545NBW (□42mm)
Scale Resolution	10nm

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Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected. A plugin for the "Autoconfig" function is equipped for user convenience. Controllers compatible with the Feedback Stage (NFS series) are available. The 10 nm Feedback Stage is available in 6 different table sizes.