Vacuum Compatible Linear Stages (1 and 2 axis)
Groups |
Description |
Travel Ranges |
Platform Sizes |
Load Capacity |
Mounting Threads |
Max. Speed |
Repeatability |
Minimum Incremental Motion |
Axis Options |
|---|---|---|---|---|---|---|---|---|---|
Vacuum Compatible Stages |
Motorized VSGSP stages are modified for use in high vacuum. These linear stages have available travel between 35 − 200mm and have a similar footprint to the SGSP series. |
35, 85, 200mm |
|
39-59kg |
Metric: M3, M4 |
10-20mm/sec |
±2.5 - 5μm |
0.2μm |
